CoorsTek Datasheets for Ceramic Fiber Heaters
Flat ceramic fiber heaters consist of an iron-chrome-aluminum (ICA) heating element and a thick layer of ceramic fiber insulation within a non-curved housing.
Ceramic Fiber Heaters: Learn more
|HEATERS & HEATING COMPONENTS CoorsTek assembles a variety of semiconductor-grade, ceramic heaters and components including: Tecorundum SiC components Aluminum nitride (AlN) heaters Quartz & Quartz-carbon heaters Silicon nitride (Si3N4) heaters...|
|Semiconductor deposition processes use a combination of volatile precursor gases, plasma, and high temperature to layer high quality thin films onto wafers. Deposition chambers and wafer handling tools need durable...|