CoorsTek Paddles For Diffusion & LPCVD Equipment

Cantilever paddles are used to position semiconductor wafer "boats" or carriers within process tubes, furnace reactors, and other thermal systems. Ceramic cantilever paddles insert and withdraw wafer carriers in process tubes with support only at one end. Longer paddles support higher wafer throughput in larger reactor, using ceramics such as silicon carbide (SiC) to provide the combination of high temperature strength, rigidity, and cleanliness required. Traditional diffusion, LPCVD (Low Pressure Chemical Vapor Deposition), and other batch semiconductor applications require the thermal and purity properties of advanced ceramics. Recommended Diffusion & LPCVD Materials TPSS, UltraClean™ Recrystallized Silicon Carbide PureSiC® CVD Silicon Carbide Coatings: CVD SiC Quartz