TSI Incorporated Datasheets for Mass Flow Meters and Controllers

Mass flow meters and controllers measure flow rate in units of mass or volume per units of time (e.g., pounds per minute). They are designed for use with gases, liquids, steams, or slurries. 
Mass Flow Meters and Controllers: Learn more

Product Name Notes
OEM Mass Flow Sensor that can be calibrated for air and O2 with accuracy of ±2% of reading ±0.05 L/min @ 21 °C. TSI's flow meter design team can...
OEM Mass Flow Sensor that can be calibrated for air and O2 with accuracy of ±2.0% of reading or 0.05 standard L/min @ 21 °C. Our engineering team can develop the...
OEM Mass Flow Sensor that can be calibrated for air with accuracy of ±2% of reading ±0.05 L/min @ 21 °C. TSI can develop the precise mechanical configuration, performance characteristics,...
OEM Mass Flow Sensor that can be calibrated for air with accuracy of ±2.0% of reading or 0.05 standard L/min @ 21 °C. Our flow measurement design team can develop the...
OEM Mass Flow Sensor that can be calibrated for air with accuracy of ±2.5% of reading ±0.1 standard L/min at 21 °C. TSI's Flow Meter design team can develop the...
OEM Mass Flow Sensor that can be calibrated for O2 with accuracy of ±2% of reading ±0.05 L/min @ 21 °C. Our flow measurement design team can develop the...
OEM Mass Flow Sensor that can be calibrated for O2 with accuracy of ±2.0% of reading or 0.05 standard L/min @ 21 °C. TSI's Flow Meter design team can develop...
OEM Mass Flow Sensor that can be calibrated for O2 with accuracy of ±2.5% of reading ±0.1 L/min @ 21 °C. TSI's flow meter design team can develop the...
Range: 0 to ± 30 Std L/min Accuracy: 1.7% of reading Calibration: Air, O2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5230-2 provides a...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: Air, CO2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5200-3 provides a...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: Air, CO2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5210-3 provides a...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: Air, N2 Includes Standard Accessory Kit The TSI Mass Flow Meter 5200-1 provides a bi-directional flow rate...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: Air, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5210-1 provides a bi-directional flow rate...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: Air, O2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5200-2 provides a...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: Air, O2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5210-2 provides a...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: Air, O2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5220-2 provides a...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: CO2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5200-7 provides a bi-directional flow rate measurement...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: CO2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5210-7 provides a bi-directional flow rate measurement...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: O2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5200-6 provides a bi-directional flow rate measurement...
Range: 0 to ± 30 Std L/min Accuracy: 2% of reading Calibration: O2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5210-6 provides a bi-directional flow rate measurement...
Range: 0 to ± 300 Std L/min Accuracy: 1.7% of reading Calibration: Air, O2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5330-2 provides a...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, CO2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5300-3 provides a...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5300-1 provides a bi-directional flow rate...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5310-1 provides a bi-directional flow rate...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, O2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5300-2 provides a...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, O2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5310-2 provides a...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, O2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5320-2 provides a...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: CO2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5300-5 provides a bi-directional flow rate measurement...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: CO2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5310-5 provides a bi-directional flow rate measurement...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: O2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5310-4 provides a bi-directional flow rate measurement...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: O2 Inlcudes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5300-4 provides a bi-directional flow rate measurement...
Range: 0 to ± 300 Std L/min Accuracy: 2% of reading Calibration: Air, CO2, N2 Includes Standard Accessory Kit The TSI Mass Flow Multi-Meter 5310-3 provides a bi-directional...
Range: 0-200 L/min. Calibration: Air, O2, N2. Connections: 1/2 inch tube. TSI mass flow meters provide accurate results with multiple data output options for measuring flows in...
Range: 0-300 L/min. Calibration: Air only. Connection: 22 mm ISO. The Mass Flow Meter 40401 features a 22 mm ISO connection. It is calibrated for air only and has a...
Range: 0-300 L/min. Calibration: Air, O2, N2. Connection: 22 mm ISO. Whether measuring gas flows in a laboratory, hospital or clinic, or manufacturing setting, TSI mass...
Range: 0-300 L/min. Calibration: Air, O2, N2. Connections: 3/4 inch tube. Whether measuring gas flows in a laboratory or manufacturing setting, TSI mass flow meters provide...
Range: 0.01-20 L/min. Calibration: Air, O2, N2. Connections: 1/4 inch tube. The TSI Mass Flow Meter 4140 (0.01-20 L/min / Air, O2 , N2...
Range: 0.01-20 L/min. Calibration: Air, O2, N2. Connections: 3/8 inch tube. The TSI Mass Flow Meter 4143 (LCD, 0.01-20 L/min / Air, O2 , N...
Range: 0.01-20 L/min. Calibration: Air. Connections: 1/4 inch tube. The TSI Mass Flow Meter 41401 (0.01-20 L/min / Air only / 1/4" tube) can be used for a multitude of...
Range: 0.01-20 L/min. Calibration: N2O, Air, O2, N2. Connections: 1/4 inch tube. The TSI Nitrous Oxide Mass Flow Meter 41403 (LCD, 0.01-20 L/min / N2O,...
Range: 0.01-20 L/min. Calibration: N2O, Air, O2, N2. Connections: 3/8 inch tube. The TSI Nitrous Oxide Mass Flow Meter 41433 (LCD, 0.01-20 L/min /...