TSI Incorporated Datasheets for MEMS Processing Equipment

MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers.
MEMS Processing Equipment: Learn more

Product Name Notes
VPG-A3 Inline Filter -- 2920-01-5001 Filtration down to 1 nm and below The VPG-A3 in-line filter is an ultra-high efficiency, ultra-low pressure drop filter designed for Vapor and Process Gas (VPG) filtration. Made from 100%...
VPG-A6 Inline Filter -- 2920-01-1000 Filtration down to 1 nm and below The VPG-A6 in-line filter is an ultra-high efficiency, ultra-low pressure drop filter designed for Vapor and Process Gas (VPG) filtration. This patent-protected filter...
Deposition Calibration Standards High-quality surface defect calibration standards improve overall performance of your inspection systems and reduce inconsistencies within your inspection tool fleet. MSP's calibration standards are leaders in the industry for consistent...
2940 FC1 Liquid Flow Controller -- 2940-01-1004 Precision control of an external Piezo valve with full scale (TEOS equivalent) of 580 mg/min This thermal Liquid Flow Controller (LFC) is designed to work with the MSP ‘PE’ series...
2940 FC2 Liquid Flow Controller -- 2940-01-1001
2940 FC3 Liquid Flow Controller -- 2940-01-1005
Precision control of an external Piezo valve with full scale (TEOS equivalent) of 6.4 g/min This thermal Liquid Flow Controller (LFC) is designed to work with the MSP ‘PE’ series...
Turbo-Vaporizer 2800 -- 2800 The 2800 Turbo-Vaporizer™ can be operated at temperatures up to 300ºC, making it a great commercial solution for high temperature applications.   This classic system is a great choice for stable...
Turbo-Vaporizer 2800PE -- 2800PE The 2800PE Turbo-Vaporizer™ is a great all around vaporizer and works well for most applications.  This model has the state-of-the art PE atomizer with on-board flow control and features a...
Turbo-Vaporizer 2801PE -- 2801PE The 2801PE Turbo-Vaporizer™ was designed for high flow, expansive vapors, making it a good solution for high flow TEMAZr applications.  This model has the state-of-the art PE atomizer with on-board...
Turbo-Vaporizer 2820 -- 2820 The 2820 Turbo-Vaporizer™ is a classic system. This model is a great choice for easy to vaporize precursors, and features wide internal channels to minimize clogging. Dimensions 224 mm x 183...
Turbo-Vaporizer 2820D -- 2820D The 2820D Turbo-Vaporizer™ has dual liquid inlets, making it a good choice for research applications or processes that require multiple liquids.  The core system is very similar to the classic...
Turbo-Vaporizer 2821 -- 2821 The 2821 Turbo-Vaporizer™ is our highest liquid flow rate unit.  This model features 3600W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent). Dimensions...
Turbo-Vaporizer 2840PE -- 2840PE The 2840PE Turbo-Vaporizer™ is one of our smallest vaporizers and has the state-of-the art PE atomizer with on-board flow control.  This model has been optimized for low flow applications; featuring...
Turbo-Vaporizer 2841PE -- 2841PE The 2841PE Turbo-Vaporizer™ was designed for high flow water vapor.  This model has the state-of-the art PE atomizer with on-board flow control, and dual heaters to combat evaporative cooling at...
Turbo-Vaporizer 2860PE -- 2860PE The 2860PE was designed as a drop-in replacement for poorly performing DLI valves. This model has the state-of-the art PE atomizer with on-board flow control, delivering superior vapor quality with significantly lower...
Auto-load 10 Nm Particle Deposition System 2300g3a - 10 Nm -- SKU: 2334 This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing...
Auto-load 20 Nm Particle Deposition System 2300g3a - 20 Nm -- SKU:2332 This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing...
Manual-load 10 Nm Particle Deposition System 2300g3m - 10 Nm -- SKU: 2335 This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high...
Manual-load 20 Nm Particle Deposition System 2300g3m - 20nm -- SKU: 2333 This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high...
Particle Size Standards Whether testing for particle size, count, or composition, it is imperative to use reliable particle suspensions to calibrate your surface scanning equipment or particle counters. A particle standard consists of...