TSI Incorporated Datasheets for MEMS Processing Equipment
MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers.
MEMS Processing Equipment: Learn more
| Product Name | Notes |
|---|---|
| Filtration down to 1 nm and below The VPG-A3 in-line filter is an ultra-high efficiency, ultra-low pressure drop filter designed for Vapor and Process Gas (VPG) filtration. Made from 100%... | |
| Filtration down to 1 nm and below The VPG-A6 in-line filter is an ultra-high efficiency, ultra-low pressure drop filter designed for Vapor and Process Gas (VPG) filtration. This patent-protected filter... | |
| High-quality surface defect calibration standards improve overall performance of your inspection systems and reduce inconsistencies within your inspection tool fleet. MSP's calibration standards are leaders in the industry for consistent... | |
| Precision control of an external Piezo valve with full scale (TEOS equivalent) of 580 mg/min This thermal Liquid Flow Controller (LFC) is designed to work with the MSP ‘PE’ series... | |
| Precision control of an external Piezo valve with full scale (TEOS equivalent) of 6.4 g/min This thermal Liquid Flow Controller (LFC) is designed to work with the MSP ‘PE’ series... | |
| The 2800 Turbo-Vaporizer™ can be operated at temperatures up to 300ºC, making it a great commercial solution for high temperature applications. This classic system is a great choice for stable... | |
| The 2800PE Turbo-Vaporizer™ is a great all around vaporizer and works well for most applications. This model has the state-of-the art PE atomizer with on-board flow control and features a... | |
| The 2801PE Turbo-Vaporizer™ was designed for high flow, expansive vapors, making it a good solution for high flow TEMAZr applications. This model has the state-of-the art PE atomizer with on-board... | |
| The 2820 Turbo-Vaporizer™ is a classic system. This model is a great choice for easy to vaporize precursors, and features wide internal channels to minimize clogging. Dimensions 224 mm x 183... | |
| The 2820D Turbo-Vaporizer™ has dual liquid inlets, making it a good choice for research applications or processes that require multiple liquids. The core system is very similar to the classic... | |
| The 2821 Turbo-Vaporizer™ is our highest liquid flow rate unit. This model features 3600W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent). Dimensions... | |
| The 2840PE Turbo-Vaporizer™ is one of our smallest vaporizers and has the state-of-the art PE atomizer with on-board flow control. This model has been optimized for low flow applications; featuring... | |
| The 2841PE Turbo-Vaporizer™ was designed for high flow water vapor. This model has the state-of-the art PE atomizer with on-board flow control, and dual heaters to combat evaporative cooling at... | |
| The 2860PE was designed as a drop-in replacement for poorly performing DLI valves. This model has the state-of-the art PE atomizer with on-board flow control, delivering superior vapor quality with significantly lower... | |
| This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing... | |
| This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing... | |
| This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high... | |
| This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high... | |
| Whether testing for particle size, count, or composition, it is imperative to use reliable particle suspensions to calibrate your surface scanning equipment or particle counters. A particle standard consists of... |