TSI Incorporated Datasheets for MEMS Processing Equipment
MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers.
MEMS Processing Equipment: Learn more
| Product Name | Notes |
|---|---|
| VPG-A3 Inline Filter -- 2920-01-5001 | Filtration down to 1 nm and below The VPG-A3 in-line filter is an ultra-high efficiency, ultra-low pressure drop filter designed for Vapor and Process Gas (VPG) filtration. Made from 100%... |
| VPG-A6 Inline Filter -- 2920-01-1000 | Filtration down to 1 nm and below The VPG-A6 in-line filter is an ultra-high efficiency, ultra-low pressure drop filter designed for Vapor and Process Gas (VPG) filtration. This patent-protected filter... |
| Deposition Calibration Standards | High-quality surface defect calibration standards improve overall performance of your inspection systems and reduce inconsistencies within your inspection tool fleet. MSP's calibration standards are leaders in the industry for consistent... |
| 2940 FC1 Liquid Flow Controller -- 2940-01-1004 | Precision control of an external Piezo valve with full scale (TEOS equivalent) of 580 mg/min This thermal Liquid Flow Controller (LFC) is designed to work with the MSP ‘PE’ series... |
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2940 FC2 Liquid Flow Controller -- 2940-01-1001
2940 FC3 Liquid Flow Controller -- 2940-01-1005 |
Precision control of an external Piezo valve with full scale (TEOS equivalent) of 6.4 g/min This thermal Liquid Flow Controller (LFC) is designed to work with the MSP ‘PE’ series... |
| Turbo-Vaporizer 2800 -- 2800 | The 2800 Turbo-Vaporizer™ can be operated at temperatures up to 300ºC, making it a great commercial solution for high temperature applications. This classic system is a great choice for stable... |
| Turbo-Vaporizer 2800PE -- 2800PE | The 2800PE Turbo-Vaporizer™ is a great all around vaporizer and works well for most applications. This model has the state-of-the art PE atomizer with on-board flow control and features a... |
| Turbo-Vaporizer 2801PE -- 2801PE | The 2801PE Turbo-Vaporizer™ was designed for high flow, expansive vapors, making it a good solution for high flow TEMAZr applications. This model has the state-of-the art PE atomizer with on-board... |
| Turbo-Vaporizer 2820 -- 2820 | The 2820 Turbo-Vaporizer™ is a classic system. This model is a great choice for easy to vaporize precursors, and features wide internal channels to minimize clogging. Dimensions 224 mm x 183... |
| Turbo-Vaporizer 2820D -- 2820D | The 2820D Turbo-Vaporizer™ has dual liquid inlets, making it a good choice for research applications or processes that require multiple liquids. The core system is very similar to the classic... |
| Turbo-Vaporizer 2821 -- 2821 | The 2821 Turbo-Vaporizer™ is our highest liquid flow rate unit. This model features 3600W of heater power and can be used to deliver flow rates up to 6000g/hr (TEOS or equivalent). Dimensions... |
| Turbo-Vaporizer 2840PE -- 2840PE | The 2840PE Turbo-Vaporizer™ is one of our smallest vaporizers and has the state-of-the art PE atomizer with on-board flow control. This model has been optimized for low flow applications; featuring... |
| Turbo-Vaporizer 2841PE -- 2841PE | The 2841PE Turbo-Vaporizer™ was designed for high flow water vapor. This model has the state-of-the art PE atomizer with on-board flow control, and dual heaters to combat evaporative cooling at... |
| Turbo-Vaporizer 2860PE -- 2860PE | The 2860PE was designed as a drop-in replacement for poorly performing DLI valves. This model has the state-of-the art PE atomizer with on-board flow control, delivering superior vapor quality with significantly lower... |
| Auto-load 10 Nm Particle Deposition System 2300g3a - 10 Nm -- SKU: 2334 | This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing... |
| Auto-load 20 Nm Particle Deposition System 2300g3a - 20 Nm -- SKU:2332 | This fully automated particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing... |
| Manual-load 10 Nm Particle Deposition System 2300g3m - 10 Nm -- SKU: 2335 | This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 10 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high... |
| Manual-load 20 Nm Particle Deposition System 2300g3m - 20nm -- SKU: 2333 | This manually-loaded particle deposition system deposits PSL and SiO2 spheres as small as 20 nm. Calibrate and qualify your defect inspection tools with ease, confidence, and efficiency by producing high... |
| Particle Size Standards | Whether testing for particle size, count, or composition, it is imperative to use reliable particle suspensions to calibrate your surface scanning equipment or particle counters. A particle standard consists of... |