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HORIBA Instruments, Inc. Datasheets for Digital Panel Meters

Digital panel meters measure and display processes and electrical variables via an alphanumeric digital readout.
Digital Panel Meters: Learn more

Product Name Notes
Accurately measures concentrations of HF and HCl used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is highly resistant to chemicals, making this unit ideal for the...
Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Repeatability: within +/- 0.003%. Measurement range :...
Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Wide measurement range : 0 - 10...
Measures a wide range of HF concentration from low concentration to undiluted liquid. The HF-960EM achieves high precision measurement by the auto-correction range switching function. Also has the capability of...
The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, high-speed measurement of low concentrations of hydrofluoric acid, hydrochloric acid and ammonia, and is thus perfect for single-bath and...
These units display the flow rate and pressure signal (0-5 VDC). DU-103K: compact model DU-102E: standard type Compliant with the RoHS directive
This monitor unit has been specially designed for mass flow meters. Flow rate alarm output function, external output: open collector Flow rate signal output: 0-5 VDC Flow rate display function...