HORIBA Instruments, Inc. Datasheets for Pressure Controllers

Pressure controllers accept input from pressure sensors, transmitters, gauges, and other devices and subsequently control adjustment to the pressure to maintain or achieve the desired pressure level.
Pressure Controllers: Learn more

Product Name Notes
Pressure Controller -- SU-503ED/502EA As a dedicated power source these setting units convert the standard flow rate setting voltage input (+5 VDC) to the desired type of flow rate. The pressure setting signal is...
Exhaust Pressure Controller -- EC-5000 Series The EC-5000 series exhaust pressure controller can maintain a consistent pressure, of the user’s choice, within the chamber. The high-resolution stepper motor and unique butterfly valve ensure a fast, sensitive...
Wafer Back Side Cooling Pressure Controller -- GR-300 Series The GR-300 Series can control gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system. The stability and accuracy of the...