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HORIBA Instruments, Inc. Datasheets for Mass Flow Meters and Controllers

Mass flow meters and controllers measure flow rate in units of mass or volume per units of time (e.g., pounds per minute). They are designed for use with gases, liquids, steams, or slurries. 
Mass Flow Meters and Controllers: Learn more

Product Name Notes
Mass flow meter and mass flow controller options with metal seal, Multi Range, Multi Gas user configurable analog / digital. Z500X is the world's leading gas Mass Flow Controller With...
Measuring a vehicle’s fuel flow requires a precise system which can run stationary and transient tests. It must also be able to offer high reproducibility and run cycle measurements under...
The delta pressure fuel flow meter FQ-3100DP assists you in the highly precise measurement of all common fuel types for engines with up to 700 kW. The differential pressure technology...
The digital liquid mass flow meter XF series uses the differential-pressur e measurement method to achieve a high-speed response of 100 msec (or less than 0.8 sec when it is...
The FQ-3200CR fuel flow measurement system precisely measures various fuel types for engines of up to 700 kW. The Coriolis measurement technology allows for the continuous and precise measurement of...
The LF-F and LV-F Series are digital liquid mass flow controllers using a Peltier element which cools the liquid rather than using the more common method of thermal heating. This...
The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor processing. View our MFC comparison...
The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM.
The SEC-Z700X Series is equipped with reliable thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of...
This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve. The high level of performance provided by the CRITERION D500 ensures it...