HORIBA Instruments, Inc. Datasheets for Gas Instruments
Gas instruments detect, monitor or analyze gases present in an environment.
Gas Instruments: Learn more
|Dissolved Ozone Monitor -- HZ-960||High precision, wide-range dissolved ozone monitor. The repeatability: F.S. +/- 0.2%. Can select the 4 types of measurement range in-line detectors. High precision. Repeatability: F.S. +/- 0.2% Wide range measurement...|
|Gas Monitor for Chamber Cleaning End Point Monitoring -- IR-200||The IR-200 monitors SiF4 gas concentration in real time and identifies the cleaning end-point based on SiF4 gas concentrations. Monitor SiF4 concentration up to 5000 ppm Compact...|
|High-Grade Gas Monitor -- IR-400||The IR-400 offers real-time monitoring of the chamber cleaning end point during the deposition process. By optimizing the cleaning process, the IR-400 reduces cleaning time and gas usage. This reduction...|
|Vapor Concentration Monitor -- IR-300||The Metal-Organic Chemical Vapor Deposition (MOCVD) process is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber...|
|Compact Process Gas Monitor -- MICROPOLE System||The MICROPOLE system is one of the smallest complete mass spectrometer systems. The compact size is achieved using a patented array design of miniature quadrupole mass filters. The array offers...|