HORIBA Instruments, Inc. Datasheets for Gas Instruments

Gas instruments detect, monitor or analyze gases present in an environment.
Gas Instruments: Learn more

Product Name Notes
Dissolved Ozone Monitor -- HZ-960 High precision, wide-range dissolved ozone monitor. The repeatability: F.S. +/- 0.2%. Can select the 4 types of measurement range in-line detectors. High precision. Repeatability: F.S. +/- 0.2% Wide range measurement...
Gas Monitor for Chamber Cleaning End Point Monitoring -- IR-200 The IR-200 monitors SiF4 gas concentration in real time and identifies the cleaning end-point based on SiF4 gas concentrations. Monitor SiF4 concentration up to 5000 ppm Compact...
High-Grade Gas Monitor -- IR-400 The IR-400 offers real-time monitoring of the chamber cleaning end point during the deposition process. By optimizing the cleaning process, the IR-400 reduces cleaning time and gas usage. This reduction...
Vapor Concentration Monitor -- IR-300 The Metal-Organic Chemical Vapor Deposition (MOCVD) process is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber...
Compact Process Gas Monitor -- MICROPOLE System The MICROPOLE system is one of the smallest complete mass spectrometer systems. The compact size is achieved using a patented array design of miniature quadrupole mass filters. The array offers...