HORIBA Instruments, Inc. Datasheets for Conductivity and Resistivity Meters

Conductivity meters, dissolved solids meters, and resistivity meters are analytical instruments that measure the conductivity, dissolved solids, and/or resistivity of a liquid sample.
Conductivity and Resistivity Meters: Learn more

Product Name Notes
Carbon Sensor Conductivity Meter (High Concentration Type) -- HE-960HC Can measures conductivity of high concentration. Its dual calculation circuits and software, combined with carbon sensors, enable measurements ranging without switching. The HE-960HC can be used as a process concentration...
Carbon Sensor Conductivity Meter -- HE-960LC Can measures conductivity of low concentration. Its dual calculation circuits and software, combined with carbon sensors, enable measurements ranging without switching. The HE-960LC can be used as a process concentration...
Carbon Sensor Conductivity Meter (Low Concentration Type) -- HE-480C-GC Compact conductivity meter for measurement of low concentration which have glass carbon sensor. A glass carbon sensor is not contaminated by metal elution and is chemically resistant. Wide range compatibility:...
Citric Acid Monitor -- HE-960CA High precision, wide-range citric acid monitor having chemical resistance sensor. Measurement range : 0 - 2%. Wide range measurement Concentration: 0 - 2%, Conductivity: 0 - 10 mS/cm High precision...
KOH Monitor -- HE-960H-KOH High precision, wide-range KOH monitor having chemical resistance sensor. Measurement range : 0 - 20%. Wide range measurement Concentration: 0 - 20%, Conductivity: 0 - 1000 mS/cm High precision PFA...
H2O2 Monitor -- HZ-960HPO-M High stability measurement H2O2 concentration. The repeatability: FS +/- 0.2%. Can select 4 types of measurement range in-line detectors. High precision. Repeatability: FS +/- 0.2% Wide range measurement 0 -...
Optical Fiber Type Hot Phosphoric Acid Concentration Monitor -- CS-620F In 3D NAND manufacturing process, dozens of layers of SiO2 and SiN are deposited, and the SiN layer is selectively removed using hot phos. In this process, the desired...
Hydrofluoric Acid Monitor -- CM-200A/210A The CM-200A/210A hydrofluoric acid monitors have been developed specifically to meet the stringent demands of semiconductor manufacturing. The CM-200A/210A provides a real time read-out of hydrofluoric acid concentration by measuring...
Multi-Point Chemical Solution Monitor -- CS-100F4 The CS-100F4 is a new system concept that enables multipoint chemical measurement in a single unit. The CS-100F4 further expands HORIBA’s CS series lineup, which is known for its high-precision...
SPM Solution Monitor -- CS-150 The CS-150 is a high-precision chemical concentration monitor designed for use with the SPM solutions used in semiconductor-manufacturing cleaning processes. Featuring fast response and a compact size, the CS-150 continually...
FPM Solution Monitor -- CS-153 The CS-153 is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes. Etching processes use FPM solution to etch silicon oxide and remove...
HF/HNO3 Monitor -- CS-153N The CS-153N is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes. Etching processes use HF/HNO3 solution to etch silicon oxide and remove...
Industrial Resistivity Meter -- HE-480R(W) The HE-480R industrial resistivity meter features the high-precision temperature compensation function. Its high-performance temperature compensation makes it ideal for sequential monitoring of ultra-pure water used in manufacturing processes in the...
Carbon Sensor Resistivity Meter -- HE-960R-GC(W) The HE-960R-GC(W) is resistivity meter to use glass carbon for its sensor. A glass carbon sensor is not contaminated by metal elution and is chemically resistant to such wet cleaning...
2-Channel Resistivity Meter -- HE-960RW-GC(W) The HE-960RW-GC(W) is a 2-channel simultaneous-measurement carbon sensor, resistivity meter that can be connected with two sensors. The measurement range is: 0 - 100.0 MΩ・cm. The high performance and high...
TMAH Solution Conductivity Meter -- HE-960TM The HE-960TM offers high precision measurement of the conductivity of TMAH (Tetra Methyl Ammonium Hydroxide) solutions, the main component of the photoresist developer that is used in semiconductor and liquid...
Motor Exhaust Gas Sulfur Analyzer -- MEXA-1170SX The MEXA 1170 SX is a new instrument used to measure sulfur for after treatment and transient lubricant oil consumption. The analyzer uses ultraviolet fluorescence (UVF) for detection and it...
Heated Type NOx Analyzer -- MEXA-1170HCLD The MEXA-1170HCLD is available as an atmospheric (A) and a vacuum (V) model. With nine ranges available from 10 ppm up to 10,000ppm, these instruments are designed to fit most...
Heated Type THC Analyzer -- MEXA-1170HFID With 14 selectable ranges - from 0-10 ppmC to 0-200,000 ppmC - MEXA-1170HFID can measure direct, CVS/tunnel-diluted, and evaporative-emission samples. A ten-key control pad and a color LCD make it...