PI (Physik Instrumente) L.P. Datasheets for Multi-axis Positioning Systems
Multi-axis positioning systems make use of linear, rotary and goniometric stages, slides and drives in various combinations to create standard and custom positioning systems.
Multi-axis Positioning Systems: Learn more
| Product Name | Notes |
|---|---|
| Basic Version for Universal Fields of Use Suitable for vacuum up to 10-6 hPa Travel ranges between 25 and 300 mm Low profile Max. Velocity to 10 mm/s Load capacity... | |
| Clear Aperture, High Travel Accuracy and Stability, Linear Motors Travel range 102 mm × 102 mm (4") Large aperture, 150 mm × 150 mm Unidirectional repeatability to 0.1 µm Velocity... | |
| Fast, Compact, and Highly Precise Travel ranges to ±17 mm / ±21° Load capacity to 5 kg Repeatability to ±0.06 µm Velocity to 10 mm/s Vacuum version available Fields of... | |
| For Inverted Microscopes from Nikon, Olympus, Zeiss, and Leica High velocity constancy at 10 µm/s Velocity up to 120 mm/s, sensor resolution 10 nm Travel range 128 mm × 86... | |
| For Loads to 60 kg Low-wear, brushless DC motors Travel ranges to 300 mm in X and Y and up to 170 mm in Z Tilt and rotation angle to... | |
| High Travel Accuracy and Stability, Linear Motor Travel range 205 mm × 205 mm (8") Unidirectional repeatability to 0.1 µm Ironless 3-phase linear motor Velocity to 200 mm/s Incremental linear... | |
| High-Precision XYZ Scanner with Aperture Travel ranges to 100 µm × 100 µm in X, Y and to 10 µm in Z Resolution to 0.1 nm due to capacitive sensors... | |
| Ideal for Scanning, Measuring, Imaging, Optical Alignment Travel range of 60 mm Direct drive motor for efficient, dynamic performance Crossed-roller bearings for true straightness, flatness, and low noise Incremental or... | |
| Inexpensive and High Precision Up to 20 nanometer steps Load capacity to 40 kg Travel ranges to ±50 mm / ±30° Repeatability to ±0.1 µm BLDC motors Works in any... | |
| Standardized Modular Platform for Industrial Automation Modular XY gantry system Various travel ranges and configurations High-performance ironless linear motors Absolute encoders with nanometer resolution Precision recirculating ball bearing guides Thermally... | |
| Versatile – Compact Design Tailored solution: Optimize your processes by configuring the most suitable linear stage for your application. This customized approach enhances productivity by meeting your precise operational needs,... | |
| XY(Z) Combinations with a Variety of Drives and Travel Ranges Very compact due to folded drive Stepper motors and closed-loop DC motors Noncontact reference and limit switches XY setups can... | |
| Flexible adaption The construction allows flexible adaption to the requirements. Technically sophisticated and cost-critical applications can be equally served with different travel ranges, drives, and measuring systems. XY assemblies are... | |
| Integrated multi-axis system - IMAS The X-417 multi-axis system is an integrated solution for industrial applications with high demands on dynamics and precision. XY or XYZ systems with suitable ACS... | |
| Precision-class XY stage PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy... | |
| Product overview The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large clear aperture. The... | |
| Problem solved PI's Fast Multichannel Photonics Alignment (FMPA) solutions combine application-optimize d, fab-ready, highly dynamic alignment stages with sophisticated controllers that integrate the world's most advanced and effective first-light search,... | |
| A new compact automated multi-axis alignment stage with controller, powerful algorithms, and software was introduced by PI at the recent Photonics West and OFC (Optical Fiber Communication) conferences in California. | |
| A preconfigured ACS controller that controls all axes is included in the alignment system's scope of delivery. FMPA routines for rapid area scans and gradient searches have been implemented in... | |
| A-361 is an air-bearing XY-ThetaZ stage with direct drives. Designed as a parallel-kinematic multi-axis system, the platform moves in the X and Y directions as well as rotational in the... | |
| A-523 is an air bearing Z tip/tilt stage with direct drive. Designed as a parallel-kinematic multi-axis system, the platform can be used for Z and tip/tilt motion. This stage offers... | |
| Compact linear stage, versatile in use Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly... | |
| F-131 is a unique two stage aligner and provides an especially versatile, compact and modular approach to building high-throughput nano-alignment processes. By combining compact precision motorized stages with a fast... | |
| Fast and high-precision drives The basis of the fiber alignment system is an XYZ setup consisting of three motorized linear stages from the M-111 series for rough alignment and a... | |
| For applications that require smooth, precise, linear motion, the PIglide RB series linear air bearings are right for you. These bearings can easily replace ball bearing and crossed roller bearing... | |
| Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high... | |
| PI's Fast Multichannel Photonics Alignment (FMPA) solutions combine application-optimize d, fab-ready, highly dynamic alignment stages with sophisticated controllers that integrate the world's most advanced and effective first-light search, profile, and... | |
| PICMAWalk is the longest-lasting piezo-motorized drive principle on the market. The lifetime of the drives is verifiably more than 100 km under atmospheric conditions. Even under vacuum conditions, a cumulative... | |
| The A-341 PIglide HGS hybrid gantry system was developed for applications that require overhead motion and long travel ranges. The A-341 hybrid gantry has a unique hybrid guide design. The... | |
| The F-141 is a cost-optimized multi-axis precision alignment system designed for fast and accurate motion in X, Y, Z & Theta-Y directions. It consists of three V-141.040 three-phase motor-driven, crossed... | |
| The F-141 PINovAlign is a cost-optimized multi-axis precision alignment system designed for fast and accurate motion in X, Y, Z & Theta-Y directions. It consists of three V-141 three-phase motor-driven,... | |
| The F-143 is a unique photonics alignment system consisting of a multi-axis, frictionless air bearing stage and an ACS / EtherCat-based high-performance motion controller with embedded first light search and... | |
| The F-836 3D alignment system consists of stacked linear stages from the L-836 series. High-resolution stepper motors, high-precision recirculating ball bearing guides, and precision linear encoders make the L-836 linear... | |
| The FMPA design is based on a highly specialized digital motion controller (E-712) and a hybrid alignment mechanism to achieve the required long travel ranges without sacrificing stability, resolution or... | |
| The H-850 series hexapods position loads of up to 250 kg with high precision and reliability. Heavy-duty precision bearings allow applications with long duty cycles. The parallel-kinematic design for 6... | |
| The M-110, M-111 and M-112 series is PI’s smallest positioning stage family with “classical” motor drives. It is offered with lead screws (higher resolution and holding force) and ball screws... | |
| The MGS gantry system has been designed to maximize throughput for applications requiring overhead motion. This stage is ideal for 3D printing, assembly, pick-and-place, alignment, inspection, and industrial automation applications. | |
| The PIglide HS planar air-bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as... | |
| The PIglide IS planar XY air-bearing stage is a low profile, high precision alternative to stacked XY stages. The fully preloaded air bearing puck floats in both X and Y... | |
| The PIglide MTT series of manual alignment tabletops can manually adjust a payload mounted to a rotary air bearing in four degrees of freedom, allowing alignment of the payload to... | |
| The Q-521 is the smallest linear stage currently available from PI. Based on the stick-slip motor principle, it boasts dimensions as small as 21×30×10mm. Open and closed-loop versions. Two linear... | |
| The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and... | |
| The U-751/M-686 XY stage is features ultrasonic piezo-electric linear motors. These compact motors allow a low profile stage design, provide a large dynamic velocity range from microns/second to >100mm/sec. The... | |
| The V-571 family of nano positioning linear stages is specifically designed for applications requiring extreme accuracy and geometric performance. This nano positioning stage excels with 0.5µm straightness and flatness per... | |
| The V-572 nano positioning linear stages are designed for high accuracy and repeatability, long life, and ease of integration with other PI stages and ACS-based controllers. The V-572 stages offer... | |
| The XYZ stage is based on the A-311 series planar XY air bearing stage and the L-310 series precision lift Z-stage. The air bearing stage is available in different travel... | |
| This low profile, integrated XY linear table is available with stepper and servo motors. Driven by a ball screw and guided by precision anti-creep crossed roller bearings for higher stiffness... | |
| V-141 direct-drive linear stages are designed for accuracy, precision, long life, ease of use, and can be mounted in any orientation. A model with integrated counterbalance is available for vertical... | |
| XY stage for the price-sensitive OEM market The M-971 is integrated into systems for inspection, lithography, or biomedical engineering and is optimized for optical microscopy. It was specially developed to... | |
| 100 x 100 x 100 Micron Travel Range Very Compact: 44 x 44 x 44 mm 1 Nanometer Resolution Ideal for Fiber-Alignment and Photonics Packaging Applications Optional E-760 Controller Card... | |
| 300x300 to 500x1000mm XY travel 10kg load Absolute encoders, 1nm resolution Z-Stage options: linear motors or ball screws Dynamic error mapping 2m/sec max velocity (cross axis) | |
| 300x300 to 500x1000mm XY travel 10kg load Absolute encoders, 1nm resolution Z-Stage options: linear motors or ball screws Dynamic error mapping 2m/sec max velocity (cross axis) Parallel-kinematic design for six... | |
| 6 motion axes: 3 × linear, 3 × rotational Travel ranges to 200 µm linear and to 1 mrad tilt angle Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology... | |
| Closed-Loop Motor Provides Smooth Motion and High Speed to 50 mm/s Travel Ranges 25 x 25mm Integrated Linear Encoders with 0.5µm Resolution 30mm Compact Height Mounts Directly to Microscopes Self-Locking... | |
| Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY,... | |
| Higher Speed Through Direct Drive Up to 2.2 kHz Resonant Frequency in X and Y 30 x 30 or 30 x 30 x 10 Micron Travel Range 100 Picometers Resolution... | |
| Highest Stiffness from Parallel-Kinematic Design 100µm Travel in Compact Design (40x40x40 mm) Unidirectional repeatability <0.2nm Capacitive Sensors PICMA® High-Performance Multilayer Piezo Actuators Extremely Lightweight at 0.08kg Ideal for Fast... | |
| Load to 35g Velocity to 1m/s, Acceleration to 2g's Straightness/Flatnes s to 0.50µm | |
| Low Profile for Easy Integration: 20 mm (0.8") Large Aperture for 1x3"Slides. Accessories & Holders Available All Parts Black Anodized for Minimum Reflections 200µm Standard Travel Range, Longer Ranges Available... | |
| Miniature Design Optical Beam Deflection to 70mrad (4°) For Mirrors up to 25.4mm (1") Diameter Frictionless, High-Precision Flexure Guiding System Parallel Kinematics for Enhanced Dynamics and Better Multi-Axis Accuracy Factory... | |
| Motorized Positioning Range: 102 x 102 millimeters Maximum Load: 3 kg Maximum Velocity: 90 mm/second Maximum Positioning Resolution: 0.05 micrometers Position Reproducibility: 0.25 micrometers unidirectional +/- 0.5 micrometers bidirectional Linear... | |
| Motorized Positioning Range: 25 to 300 millimeters Maximum Load: 5 kg Maximum Velocity: 20 mm/second Maximum Positioning Resolution: 0.2 micrometers Position Reproducibility: 0.4 micrometers unidirectional +/ 10 micrometers bidirectional | |
| Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 340 x 340 x 340 µm Capacitive Sensors for Highest Linearity Frictionless, High-Precision Flexure Guiding System Excellent Scanning... | |
| Six degrees of freedom ±7 mm travel range in X and Y, and ±5 mm in Z ±7° rotation range in θX, θY, and ±8° in θZ 10 N load... | |
| Small Footprint: 60 x 60 mm 100 x 100 Micron Travel Range Resolution to 0.8 Nanometer For Cost-Sensitive Applications Clear Aperture: 20 x 20 mm PICMA ® High-Performance Multilayer Piezo... | |
| Stable platform for P-545 PInano® piezo Nano positioning systems Low profile for easy integration: 30 mm Travel range 25 mm × 25 mm Micrometer screws, motor upgrade available For inverted... | |
| XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to... |