Park Systems, Inc. Datasheets for Scanning Probe Microscopes

Scanning probe microscopes form images of surfaces by using a physical probe that scans the specimen. Examples include AFMs (atomic force microscopes), MFMs (magetic force microscopes), and STMs (scanning tunneling microscopes).
Scanning Probe Microscopes: Learn more

Product Name Notes
XE-LCD Atomic Force Microscopy (AFM) is emerging as an essential tool in many industries. With its ability to accurately measure critical dimensions in the micrometer to nanometer regime, the AFM is...
XE-PTR Hard Disk Drive (HDD) manufacturers can now reliably depend on Park Systems’ XE-PTR, a fully automated industrial in-line AFM for automatic Pole Tip Recession measurements on rowbar-level sliders. As most...
XE-3DM Park Systems has revolutionized the AFM with the introduction of the XE-3DM, the fully automated AFM system designed for overhang and trench profiles, sidewall roughness and imaging, and critical angle...
XE-120 Take the award-winning XE-100, shrink it such that it can be placed on top of the many popular inverted optical microscopes, and you have the versatile XE-120, an exceptional AFM...
XE-100 The XE-100 is our flagship AFM with reduced drift rate and the Step-and-Scan Automation that provides the ultimate AFM/SPM performance in Non-Contact nanoscale metrology. It is a mid-priced system for...
XE-200 The XE-200 is an AFM with increased capacity that supports 200 mm wafer investigation. In addition to the precise scan performance provided by True Non-Contact mode, the XE-200 offers users...
XE-NSOM The XE-NSOM is specially designed and tailored for advanced optical measurements including Near-field Scanning Optical Microscopy (NSOM), Raman Spectrometry, and Confocal Microscopy. The XE-NSOM provides a complete AFM system setup...
XE-WAFER The XE-WAFER is a fully automated industrial AFM designed specifically to address surface roughness, trench width, depth, and angle measurements on 200mm & 300mm wafers in a production environment. The...
XE-150 With the arrival of the XE-150, Park Systems’ large sample AFM, Non-Contact AFM imaging has become the most feasible and practical way to scan your large samples with ultimate AFM...
XE-70 XE-70 is Park Systems’ AFM solution for researchers with limited budget. XE-70 does not compromise any of the innovative technologies of the XE-series that sets it apart from conventional AFMs,...
XE-Bio XE-Bio is a powerful 3-in-1 nanoscience research tool that uniquely combines industry’s only True Non-Contact AFM with Ion Conductance Microscopy (ICM) and inverted optical microscope on the same platform. The...
XE-HDM XE-HDM is an automatic defect review AFM which revolutionizes the way defects in HDD substrates and media are searched, scanned, and analyzed. The new XE-HDM significantly increases throughput for the...