XE-HDM is an automatic defect review AFM which revolutionizes the way defects in HDD substrates and media are searched, scanned, and analyzed. The new XE-HDM significantly increases throughput for the defect review process; test runs with real defects demonstrate over 500 - 800% gain in throughput when compared with other methods of defect review.
Artifact Free Metrology by Crosstalk Elimination • Two independent, closed-loop XY and Z flexure scanners for sample and tip • Flat and linear XY scan of 100 μm x 100 μm with low residual bow • Out of plane motion of less than 2 nm over entire scan range • Accurate feature measurements with industry leading gauge sigma • Superior tool to tool matching
Longer Tip Life by True Non-Contact Mode • 10 times larger Z-scan bandwidth than a piezotube • 10 times or longer tip life for general purpose & defect imaging • Less tip wear for prolonged high-quality and high-resolution imaging • Minimized sample damage or modification • Immunity from parameter-dependent results observed in tapping imaging
Automatic Defect Review for Media and Substrates • Full automation results in 500~800% gain in throughput • Allows users to manage several tools simultaneously • Transfer KLA Tencor Candela defect maps to XE-HDM • Automated survey scan of defects mapped by Candela • Automated zoom-in scan of specified defects • Automated profiling of imaged defect types • Automated analysis of imaged defects