Micro-Epsilon Group Datasheets for Interferometers
Interferometers measure distance in terms of wavelength and determine the wavelengths of light sources.
Interferometers: Learn more
| Product Name | Notes |
|---|---|
| The IMP DS0.5/90/VAC is a right-angle distance sensor for absolute interferometer measurements with a 1.5 mm distance measuring range, a 10 µm light spot and a start of measuring range... | |
| The IMP DS1/VAC is a miniature distance sensor for absolute interferometer measurements with a 1 mm distance measuring range, a 10 µm light spot and an integrated vacuum optical fiber. | |
| The IMP DS10/90/VAC is a right-angle distance sensor for absolute interferometer measurements with a 1.5 mm distance measuring range, a 10 µm light spot and a start of measuring range... | |
| The IMP DS19 is a distance sensor for absolute interferometer measurements with a 2.1 mm distance measuring range, a 10 µm light spot and a start of measuring range of... | |
| The IMP DS19/VAC is a distance sensor for absolute interferometer measurements with a 2.1 mm distance measuring range, a 10 µm light spot and a start of measuring range of... | |
| The IMP TH45 is a thickness sensor for interferometer measurements with a 45 mm ±3.5 mm working distance and a thickness measuring range of 0.035 to 1.4 mm. It provides... | |
| The IMP TH45/VAC is a thickness sensor for interferometer measurements with a 45 mm ±3.5 mm working distance and a thickness measuring range of 0.035 to 1.4 mm. It provides... | |
| The IMP TH70 is a thickness sensor for interferometer measurements with a 70 mm ±2.1 mm working distance and a thickness measuring range of 0.035 to 1.4 mm. It provides... | |
| The IMP-NIR-TH24 is a wafer thickness sensor with a 24 mm ±3.0 mm working distance, a 21 to 27 mm operating range and a measuring range of 50 µm to... | |
| The IMP-NIR-TH24(204) is a wafer thickness sensor with a 24 mm ±3.0 mm working distance, a 21 to 27 mm operating range and a measuring range of 50 µm to... | |
| The IMP-NIR-TH3/90/IP68 is a compact right-angle wafer thickness sensor with a 3 mm working distance, a 1 to 6 mm operating range and IP68 protection. The sensor integrates a 4... | |
| The IMS5200MP-TH white light interferometer is used for fast and reliable thickness measurements of thin transparent layers from 1 µm to 100 µm. The matched system enables multi-peak measurement, so... | |
| The IMS5400-DS absolute interferometer opens up new perspectives in industrial distance measurements. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer resolution at a relatively large... | |
| The IMS5400-TH absolute interferometer opens up new perspectives in industrial thickness measurements. The interferometer is used for highly accurate thickness measurements from a relatively large distance. The large thickness measuring... | |
| The IMS5400MP-DS absolute interferometer enables absolute distance measurements with nanometer resolution at a relatively large offset distance. With multi-peak distance measurement, up to 14 distance values can be evaluated, allowing... | |
| The IMS5400MP-TH absolute interferometer is used for highly accurate thickness measurements from a relatively large distance. A decisive advantage is the distance-independent measurement, where a stable nanometer-accurate thickness value is... | |
| The IMS5420-TH absolute interferometer opens up new perspectives in the industrial thickness measurement of monocrystalline silicon wafers and silicon carbide wafers and comparable materials that are transparent for a wavelength... | |
| The IMS5420IP67-TH absolute interferometer is designed for industrial wafer thickness measurement in challenging environmental conditions such as wafer lapping. The IP67 controller with stainless steel housing provides stable signal quality... | |
| The IMS5420IP67MP-TH absolute interferometer is designed for challenging environmental conditions and combines an IP67 stainless steel controller with multipeak thickness measurement of up to five layers. It is suitable for... | |
| The IMS5420MP-TH absolute interferometer opens up new perspectives in the industrial thickness measurement of monocrystalline silicon wafers and silicon carbide wafers and comparable materials that are transparent for a wavelength... | |
| The IMS5600-DS absolute interferometer is used for distance measurements with maximum precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The interferometer... | |
| The IMS5600MP-DS absolute interferometer is used for distance measurements with maximum precision and enables absolute measurements with subnanometer resolution. With multi-peak distance measurement, up to 14 distance values can be... | |
| The innovative IMS5200-TH white light interferometer from Micro-Epsilon opens up new perspectives for fast and reliable thickness measurements of thin layers from 1 µm to 100 µm. The interferometers are... |