Micro-Epsilon Group Datasheets for Interferometers

Interferometers measure distance in terms of wavelength and determine the wavelengths of light sources.
Interferometers: Learn more

Product Name Notes
The IMS5400-DS white light interferometer is used for absolute distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer accuracy at a relatively large offset...
The IMS5400-TH white light interferometer is used for highly accurate thickness measurements from a relatively large distance. A decisive advantage here is the distance-independent measurement, where a stable nanometer-accurate thickness...
The IMS5600-DS white light interferometer is used for distance measurements with highest precision. The controller offers a special calibration with intelligent evaluation and enables absolute measurements with subnanometer resolution. The...