The IMP-NIR-TH24 is a wafer thickness sensor with a 24 mm ±3.0 mm working distance, a 21 to 27 mm operating range and a measuring range of 50 µm to 1.05 mm for silicon and 0.2 to 4 mm for air gaps. It provides a 15 µm light spot for precise inline wafer measurements.
| Micro-Epsilon Group | |
|---|---|
| Product Category | Interferometers |
| Product Number | interferoMETER IMP-NIR-TH24 |
| Product Name | Sensors for wafer thickness measurements |
| Measurement Capability | Thickness; Specialty / Other; Wafer thickness |
