The IMP DS10/90/VAC is a right-angle distance sensor for absolute interferometer measurements with a 1.5 mm distance measuring range, a 10 µm light spot and a start of measuring range of 10 mm. The cable and sensor are designed for UHV operation.
| Micro-Epsilon Group | |
|---|---|
| Product Category | Interferometers |
| Product Number | interferoMETER IMP DS10/90/VAC |
| Product Name | Sensors for distance measurements |
| Measurement Capability | Displacement / Position; Specialty / Other; Distance |
