HORIBA Instruments, Inc. Pressure Insensitive Mass Flow Controller SEC-Z700X Series

The SEC-Z700X Series is equipped with reliable thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of gas delivery systems. Pressure Insensitive A new high-performance function provides a simplified gas supply system. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700X Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. Flow rate output, temperature and pressure readings are provided. View our MFC comparison chart here. Multi Gas / Multi Range function The gas type and full scale flow rate can be changed by the customer Variable PID function gives high speed response (within 1 second) across the whole flow range Compact gas line There is no need for a regulator, transducer and filter Stable control of the gas flow without effect by upstream and downstream pressure fluctuations Integrated Inlet Pressure Sensor On board Multi display Warranty 1% Set Point high accuracy Ultra clean design - metal diaphragm, all stainless SUS-316L and polished surface treatment(standard). Compact size Same fitting to fitting dimension up to 50 SLM Signal compatibility Analog/RS485 Digital Model , DeviceNet™ Model Network function Controlled by digital signal.