Agilent Technologies - Vacuum Division Datasheets for High Vacuum Pumps

High and ultrahigh vacuum pumps operate efficiently in the high vacuum region and develop molecular flow for highly evacuated systems.
High Vacuum Pumps: Learn more

Product Name Notes
Turbo Pumping Systems -- TPS-mini A small and compact, easy-to-use, integrated dry vacuum system, featuring the new Agilent TwisTorr 84 FS Turbo Pump with improved vacuum performance, backed by a dry 10 l/min diaphragm pump.
Large VacIon Plus Pumps Agilent Large VacIon Plus pumps range from Nitrogen pumping speeds of 150 L/s to the brand new 1000 L/s pump. These pumps are available with Diode, Noble Diode, and StarCell...
Medium VacIon Plus Pumps Agilent Medium VacIon Plus pumps range from pumping speeds of 20 to 75 L/s for Nitrogen. These pumps are available with Diode, Noble Diode, and StarCell elements. Diode Vaclon Plus...
Combination VacIon Plus Pumps Agilent VacIon Plus Combination Pumps integrate titanium sublimation pumping to achieve ultra-high vacuum. The Titanium Sublimation Pump (TSP) creates extra high pumping speed for getterable gases while the ion pump...
High Vacuum Diffusion Pump -- HS-16
High Vacuum Diffusion Pump -- HS-2
High Vacuum Diffusion Pump -- HS-20
High Vacuum Diffusion Pump -- HS-32
High Vacuum Diffusion Pump -- NHS-35
Available in 2 in. and 16 in. through 35 in. sizes, the low-cost HS-series pumps provide high speed, low ultimate pressure, high throughput, high tolerable forepressure, and low backstreaming. The...
High Vacuum Diffusion Pump -- VHS-10
High Vacuum Diffusion Pump -- VHS-250
High Vacuum Diffusion Pump -- VHS-4
High Vacuum Diffusion Pump -- VHS-400
High Vacuum Diffusion Pump -- VHS-6
Available in 4-inch, 6-inch, 250-mm, 10-inch, and 400-mm sizes, the VHS series pumps are the fastest and cleanest diffusion pumps of their size available today. The VHS series patented Bulge...
High Vacuum Turbo Pumping System -- TPS Mobile Roll-around cart, high capacity systems, with higher compression ratio and wide pumping speed range. Fourteen possible configurations, with Varian Turbo-V 81, 301, 551 Navigator pumps & Dry Scroll (New unique...
Turbo Pumping Systems -- TPS-flexy The Agilent TPS-flexy Turbo Pumping System is a powerful do-it-yourself high vacuum system suitable for a wide array of challenging applications. The TPS-flexy package allows you to create a specialized...
High Vacuum Turbo Pump -- TwisTorr 304 FS The Agilent TwisTorr 304 FS turbomolecular high-vacuum pump combines Twistorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. TwisTorr drag stages create high compression...
High Vacuum Turbo Pump -- TwisTorr 84 FS The Agilent TwisTorr 84 FS turbomolecular high-vacuum pump combines TwisTorr drag stage technology and Agilent Floating Suspension to provide high performance, reliability and economy. TwisTorr drag stages create high compression...
High Vacuum Diffusion Pump -- AX-65 The AX-65 diffusion pump is a high-performance, air-cooled pump designed with bench-top analytical instruments in mind. Its vertical finned boiler and high power provide stable pumping and high helium pumping...
Miniature and Small VacIon Pumps The Miniature Vaclon pump is a diode configuration and provides approximately 0.4 l/s of nitrogen pumping speed. The 2 l/s model is a modified diode configuration to enhance starting at...
High Vacuum Turbo Pumping System -- TPS Compact The new Dry TPS-compact is a portable, fully integrated turbo pumping system powered by the Turbo-V 81 MacroTorr or Turbo-V 301 Navigator pumps, backed by the Agilent (formerly Varian) 60...
High Vacuum Turbo Pump -- Turbo-V 1001 Navigator The Turbo-V 1001 Navigator pump provides pumping speeds from 790-1,050 liters/sec (gas dependent), and includes the latest technology offerings in the Navigator line. The pump is optimized for high-compression ratio...
High Vacuum Turbo Pump -- Turbo-V 1K-G The Turbo-V 1K-G is more than a pump. It is a dedicated pumping system, designed specifically for thin film deposition equipment. Its pumping stages, and the entire pump structure, are...
High Vacuum Turbo Pump -- Turbo-V 2300 TwisTorr The Turbo-V 2300 TwisTorr pump offers the highest pumping speeds in its category for N2. Utilizing leading-edge Twistorr technology, the pump achieves higher compression ratios for light gases...
High Vacuum Turbo Pump -- Turbo-V 2K-G The Turbo-V 2K-G is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and the entire pump structure, are...
High Vacuum Turbo Pump -- Turbo-V 3K-G The Turbo-V 3K-G Turbomolecular Pump (like V 2K-G) is more than a pump. It is a dedicated pumping system, designed specifically for the plasma process industry. Its pumping stages, and...
High Vacuum Turbo Pump -- Turbo-V 551 Navigator The Turbo-V 551 Navigator turbomolecular vacuum pump with MacroTorr drag technology delivers high compression ratios, high throughput, and high discharge pressures for a wide-range of high vacuum applications. The unique...
High Vacuum Turbo Pump -- Turbo-V 701 Navigator The Turbo-V 701 Navigator pump provides pumping speeds from 510-690 liters/sec (gas dependent), and includes the latest technology offerings in the Navigator line. The pump is optimized for high-compression ratio...