The Agilent Turbo-V 3K-G high-throughput turbomolecular pump is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon under high temperature load. This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include solar and flat panel display manufacturing. The pump's robust design and its advanced integrated electronics make the Turbo-V 3K-G the optimum pumping solution for the vacuum coating industry.
Application-specific pumping solution designed for thin film deposition
Optimized to work with very high flows of argon
Integrated pump and controller can be installed in any position for simple operation with a reduced footprint
Capability to manage high gas flow, enabling operation in high-throughput applications with DN250
Rugged design and highly efficient cooling system for continuous operation
Pump gas purge protects pump bearings and allows seamless operation with system contaminants and particulates
Low noise level for zero impact on the system
Maintenance-free bearings for zero operating cost
Ready for wireless control via Vacuum Link app for pump operation on the go and profibus
Versatile electronic interface including analog I/O signals and RS232/RS485 for remote controlling by A-Plus software
The Agilent Turbo-V 3K-G high-throughput turbomolecular pump is a dedicated vacuum pumping system, designed specifically as a turbo pump for thin film deposition equipment. Its pumping stages, and the entire pump structure, are optimized to work with very high flows of argon under high temperature load.
This robust turbo pump is suitable for harsh manufacturing environments because of its rugged design. Typical industrial vacuum coating applications include solar and flat panel display manufacturing. The pump's robust design and its advanced integrated electronics make the Turbo-V 3K-G the optimum pumping solution for the vacuum coating industry.
- Application-specific pumping solution designed for thin film deposition
- Optimized to work with very high flows of argon
- Integrated pump and controller can be installed in any position for simple operation with a reduced footprint
- Capability to manage high gas flow, enabling operation in high-throughput applications with DN250
- Rugged design and highly efficient cooling system for continuous operation
- Pump gas purge protects pump bearings and allows seamless operation with system contaminants and particulates
- Low noise level for zero impact on the system
- Maintenance-free bearings for zero operating cost
- Ready for wireless control via Vacuum Link app for pump operation on the go and profibus
- Versatile electronic interface including analog I/O signals and RS232/RS485 for remote controlling by A-Plus software
