The Agilent VacIon Plus 40 pump is a medium-sized 40 L/s ion pump for use in general-purpose UHV and XHV systems for evacuating electron devices, scanning electron microscopes (SEM), and in academic and high-energy physics (HEP) research. This pump delivers stable vacuum and low leakage current, protecting critical components in SEM applications. The combination of our patented anode design and StarCell element deliver a powerful solution to optimize E-beam columns. User-selected options like high-voltage (HV) feedthroughs are available for easy system integration.
Select from StarCell, diode, and noble diode elements to provide the best pumping speed for different gases
Available with ConFlat 2.75² rotatable or non-rotatable flange, additional 2.75² ConFlat port, and a choice of feedthroughs (Fischer, King, DESY, Varian, SHV 10kV (Safeconn)) in different orientations
No moving parts ensures vibration-free operation for sensitive applications
Low leakage current provides stable vacuum pressure reading
Low magnetic field minimizes system interference
Vacuum processed at >400 °C and pinched off under vacuum to ensure cleanliness and vacuum integrity prior to installation
Customizable with different high-voltage feedthroughs, body geometries, additional ports, and pumping cell arrangements and available with optically shielded baffles, external heaters, and magnetic shielding to meet your needs
SEM versions are available with ultralow leakage current and high stability for minimal electrical interference
Special testing procedures for your specific requirements can be added
The Agilent VacIon Plus 40 pump is a medium-sized 40 L/s ion pump for use in general-purpose UHV and XHV systems for evacuating electron devices, scanning electron microscopes (SEM), and in academic and high-energy physics (HEP) research.
This pump delivers stable vacuum and low leakage current, protecting critical components in SEM applications. The combination of our patented anode design and StarCell element deliver a powerful solution to optimize E-beam columns. User-selected options like high-voltage (HV) feedthroughs are available for easy system integration.
- Select from StarCell, diode, and noble diode elements to provide the best pumping speed for different gases
- Available with ConFlat 2.75² rotatable or non-rotatable flange, additional 2.75² ConFlat port, and a choice of feedthroughs (Fischer, King, DESY, Varian, SHV 10kV (Safeconn)) in different orientations
- No moving parts ensures vibration-free operation for sensitive applications
- Low leakage current provides stable vacuum pressure reading
- Low magnetic field minimizes system interference
- Vacuum processed at >400 °C and pinched off under vacuum to ensure cleanliness and vacuum integrity prior to installation
- Customizable with different high-voltage feedthroughs, body geometries, additional ports, and pumping cell arrangements and available with optically shielded baffles, external heaters, and magnetic shielding to meet your needs
- SEM versions are available with ultralow leakage current and high stability for minimal electrical interference
- Special testing procedures for your specific requirements can be added
