Brooks Instrument Datasheets for Mass Flow Meters and Controllers

Mass flow meters and controllers measure flow rate in units of mass or volume per units of time (e.g., pounds per minute). They are designed for use with gases, liquids, steams, or slurries. 
Mass Flow Meters and Controllers: Learn more

Product Name Notes
Coriolis Mass Flow Meter, Quantim® 5850EM Series -- QMBC2 / QMBM2 / QMBC3 / QMBM3 / QMBC4 / QMBM4 Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis mass flow controllers and meters from Brooks Instrument. Brooks has taken...
High Temperature Mass Flow Controller & Meter, 9861 Series -- 9861 Engineered for the challenging conditions associated with high temperature delivery of condensable precursors and dopants, the 9861 Series high temperature thermal mass flow controllers and meters from Brooks Instrument feature...
Elastomer Sealed Thermal Mass Flow Meter, 5850E and i Series -- 5850E, i / 5860E, i / 5851E, i / 5861E, i / 5853E, i / 5863E, i Every product line has a workhorse — our 5850E and 5850i Series thermal mass flow controllers fit the bill. Actively in use for decades in thousands of applications worldwide, they...
Metal Sealed Thermal Mass Flow Controller & Meter, GF100 Series -- GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121 Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for...
Metal Sealed Thermal Mass Flow Controller & Meter, GF80 Series -- GF80 / GF81 For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast...
Elastomer Sealed Thermal Mass Flow Meter, SLA5800 Series -- SLA5860 / SLA5861 / SLA5863 Imagine choosing just one mass flow controller platform to handle fourteen different pressure or flow rates going into a single process. All while delivering the exact same, ultra-precise and repeatable...
Elastomer Sealed Thermal Mass Flow Controller & Meter, GF40 Series -- GF40 Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect...
Elastomer Sealed Thermal Mass Flow Controller & Meter, 4800 Series -- 4850 / 4860 The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters:...
Metal Sealed Thermal Mass Flow Controller & Meter, GF125 Series -- GF125 / GF125HA / GF126 Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to...
Elastomer Sealed Mass Flow Meter, 5700 Series -- 5700 When you need a compact, economical mass flow meter that delivers long-term, stable flow measurement without requiring temperature or pressure correction, the 5700 Series thermal mass flow meter meets your...
Elastomer Sealed Thermal Mass Flow Meter, SLAMf Series -- SLAMf60 / SLAMf61 / SLAMf63 Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed thermal mass flow controllers and meters deliver the precise accuracy and long-term stability of our proven...