Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.
Features
Long-term zero stability of <±0.5% full scale per year
Ultra-fast settling times: 300 ms - <700 ms
Full-scale flow rates up to 300 slpm
Ultra-high purity flow path - 4µ inch Ra surface finish
SEMI F20 compliant wetted materials
Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
MultiFloTM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
Local display indicates flow, temperature, pressure and network address for easy troubleshooting of gas supply and isolation valve issues
Optional High Accuracy configuration
DeviceNetTM, RS-485 L-Protocol and analog interfaces
Benefits
By combining Brooks' patented flow sensor technology with a fast acting diaphragm free valve assembly, the GF125 Series delivers up to 3 times faster response and settling time compared to other mass flow controllers
Optimized wetted flow path for improved dry-down
With MultiFloTM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility
A full gas database delivers the widest process gas coverage
Pressure Transient Insensitivity (PTI) capability overcomes limitations of conventional MFCs that react strongly to small inlet pressure fluctuations. The result is stable performance and predictable accuracy.
GF125 High Accuracy (HA) with superior low setpoint accuracy makes it possible to replace two (a high and low flow) mass flow controllers with one, providing immediate cost savings while freeing up a gas line for greater gas panel flexibility.
Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
Key Applications
Semiconductor
MOCVD
Gas flow control applications that require a high purity all-metal flow path
Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.
Features
- Long-term zero stability of <±0.5% full scale per year
- Ultra-fast settling times: 300 ms - <700 ms
- Full-scale flow rates up to 300 slpm
- Ultra-high purity flow path - 4µ inch Ra surface finish
- SEMI F20 compliant wetted materials
- Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
- Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
- MultiFloTM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
- Local display indicates flow, temperature, pressure and network address for easy troubleshooting of gas supply and isolation valve issues
- Optional High Accuracy configuration
- DeviceNetTM, RS-485 L-Protocol and analog interfaces
Benefits
- By combining Brooks' patented flow sensor technology with a fast acting diaphragm free valve assembly, the GF125 Series delivers up to 3 times faster response and settling time compared to other mass flow controllers
- Optimized wetted flow path for improved dry-down
- With MultiFloTM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility
- A full gas database delivers the widest process gas coverage
- Pressure Transient Insensitivity (PTI) capability overcomes limitations of conventional MFCs that react strongly to small inlet pressure fluctuations. The result is stable performance and predictable accuracy.
- GF125 High Accuracy (HA) with superior low setpoint accuracy makes it possible to replace two (a high and low flow) mass flow controllers with one, providing immediate cost savings while freeing up a gas line for greater gas panel flexibility.
- Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
Key Applications
- Semiconductor
- MOCVD
- Gas flow control applications that require a high purity all-metal flow path
