Brooks Instrument Metal Sealed Thermal Mass Flow Controller & Meter, GF80 Series GF80 / GF81

For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point. Moving to a metal sealed MFC brings the full benefit of MultiFloTM multi-gas/multi-rang e capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely. Features Long-term zero stability of <±0.5% full scale per year <1 second settling times Full-scale flow rates up to 300 slpm All-metal seal flow path - 16µ inch Ra surface finish Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition Programmable MultiFloTM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy Best-in-class temperature coefficient specification through active temperature compensation Embedded self-test routines and independent diagnostic/service port Slimline body with VCR fittings DeviceNetTM, Profibus®, RS-485 and analog interfaces Benefits Fast <1 second flow settling time eliminates wasted gas and process variability No elastomer seals that can have oxygen permeation, requiring replacement over time MultiFloTM simplifies and streamlines changing process gases — no more removing and calibrating MFCs New gases and/or ranges can be set in under 60 seconds Measurement accuracy not affected by temperature variations Convenient access to diagnostics port for maximum uptime Compact size eases integration into tight machine spaces; excellent choice for retrofits Multi-protocol communication interface simplifies integration into existing systems Applications Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools Reduce MFC inventory in six-inch/eight-inch semiconductor fabs MOCVD for LED and power device manufacturing Solar/thin film chemical vapor deposition (CVD) systems Analytical OEM equipment