Brooks Instrument Datasheets for Flow Controllers

Flow controllers monitor and maintain flow-rate variables, typically in process applications.
Flow Controllers: Learn more

Product Name Notes
Metal Sealed Thermal Mass Flow Controller, 5850EM Series -- 5850EM / 5851EM 5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E &
Coriolis Mass Flow Controller, Quantim® Series -- QMBC2 / QMBM2 / QMBC3 / QMBM3 / QMBC4 / QMBM4 Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis mass flow controllers and meters from Brooks Instrument. Brooks has taken...
High Temperature Mass Flow Controller, 9861 Series -- 9861 Engineered for the challenging conditions associated with high temperature delivery of condensable precursors and dopants, the 9861 Series high temperature thermal mass flow controllers and meters from Brooks Instrument feature...
Elastomer Sealed Thermal Mass Flow Controller, 5850E & i Series -- 5850E, i / 5860E, i / 5851E, i / 5861E, i / 5853E, i / 5863E, i Every product line has a workhorse — our 5850E and 5850i Series thermal mass flow controllers fit the bill. Actively in use for decades in thousands of applications worldwide, they...
Metal Sealed Thermal Mass Flow Controller, GF100 Series -- GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121 Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for...
Metal Sealed Thermal Mass Flow Controller, GF80 Series -- GF80 / GF81 For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast...
Elastomer Sealed Thermal Mass Flow Controller, SLA5800 Series -- SLA5850 / SLA5851 / SLA5853 Imagine choosing just one mass flow controller platform to handle fourteen different pressure or flow rates going into a single process. All while delivering the exact same, ultra-precise and repeatable...
Metal Sealed Thermal Mass Flow Controller, GF135 Series -- GF135 Keep critical flow processes on-target and maximize throughput with the GF135 Advanced Diagnostics Pressure Transient Insensitive (PTI) mass flow controller. The world’s first “smart” mass flow controller is a true...
Elastomer Sealed Thermal Mass Flow Controller & Meter, GF40 Series -- GF40 Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect...
High Temperature Mass Flow Controller, 5850EMH Series -- 5850EMH / 5851EMH Offering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak...
Manual Flow Controller, FC Series -- FC8744 / FC8800, FC8812 / FC8900 Supply or discharge pressures may vary. But with flow controllers from Brooks Instrument, the differential pressure across the integral manual flow regulating valve remains constant. An internal diaphragm-actuated control valve...
Elastomer Sealed Thermal Mass Flow Controller, 4800 Series -- 4850 / 4860 The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters:...
Metal Sealed Thermal Mass Flow Controller, GF125 Series -- GF125 / GF125HA / GF126 Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to...
Elastomer Sealed Thermal Mass Flow Controller, SLAMf Series -- SLAMf50 / SLAMf51 / SLAMf53 Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed thermal mass flow controllers and meters deliver the precise accuracy and long-term stability of our proven...