Brooks Instrument Datasheets for Flow Controllers
Flow controllers monitor and maintain flow-rate variables, typically in process applications.
Flow Controllers: Learn more
| Product Name | Notes |
|---|---|
| 5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & | |
| Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis mass flow controllers and meters from Brooks Instrument. Brooks has taken... | |
| Engineered for the challenging conditions associated with high temperature delivery of condensable precursors and dopants, the 9861 Series high temperature thermal mass flow controllers and meters from Brooks Instrument feature... | |
| Every product line has a workhorse — our 5850E and 5850i Series thermal mass flow controllers fit the bill. Actively in use for decades in thousands of applications worldwide, they... | |
| Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for... | |
| For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast... | |
| Imagine choosing just one mass flow controller platform to handle fourteen different pressure or flow rates going into a single process. All while delivering the exact same, ultra-precise and repeatable... | |
| Keep critical flow processes on-target and maximize throughput with the GF135 Advanced Diagnostics Pressure Transient Insensitive (PTI) mass flow controller. The world’s first “smart” mass flow controller is a true... | |
| Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect... | |
| Offering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak... | |
| Supply or discharge pressures may vary. But with flow controllers from Brooks Instrument, the differential pressure across the integral manual flow regulating valve remains constant. An internal diaphragm-actuated control valve... | |
| The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters:... | |
| Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to... | |
| Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed thermal mass flow controllers and meters deliver the precise accuracy and long-term stability of our proven... |