Engineered for the challenging conditions associated with high temperature delivery of condensable precursors and dopants, the 9861 Series high temperature thermal mass flow controllers and meters from Brooks Instrument feature a high purity, high leak integrity metal flow path ensuring compatibility with all process gases and vapors. The patented IsoSensor™ is a high stability flow sensor compatible with the elevated environmental temperatures found in heated gas lines and baking systems. The ultra-low drift performance of the IsoSensor™ reduces the need for frequent re-zeroing and recalibration typical in high temperature applications.
| Brooks Instrument | |
|---|---|
| Product Category | Liquid Flow Meters |
| Product Number | 9861 |
| Product Name | High Temperature Mass Flow Controller & Meter, 9861 Series |
| Meter Technology | Thermal |
| Features | Controller |
| Process Media Type | Liquid |
| Operating Pressure | 0.1929 to 50.76 psi (0.1358 to 35.73 m H2O) |
| Media Temperature | 302 F (150 C) |
