Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
Features
Programmable multi-gas/multi-rang
e capabilities
Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
Sub-1 second flow response time and accuracy of 1% set point for demanding applications
Well suited for a variety of gases
Fast response, Hastelloy sensor
Easily accessible diagnostic service port is independent of tool communication
Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
Benefits
MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
User-accessible service port simplifies troubleshooting and diagnostic tasks
Variety of elastomer seals provide cost performance flexibility across range of applications
Multi-protocol communication interface supports integration into existing systems
Applications
Solar cell chemical vapor deposition systems
Life sciences bioreactors
Vacuum processes
Nanotechnology/MEMS fabrication
Plasma, glass and web coating systems
Excellent option for manifold/gas delivery systems
Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
Features
- Programmable multi-gas/multi-range capabilities
- Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
- Sub-1 second flow response time and accuracy of 1% set point for demanding applications
- Well suited for a variety of gases
- Fast response, Hastelloy sensor
- Easily accessible diagnostic service port is independent of tool communication
- Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
Benefits
- MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
- MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
- OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
- Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
- Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
- User-accessible service port simplifies troubleshooting and diagnostic tasks
- Variety of elastomer seals provide cost performance flexibility across range of applications
- Multi-protocol communication interface supports integration into existing systems
Applications
- Solar cell chemical vapor deposition systems
- Life sciences bioreactors
- Vacuum processes
- Nanotechnology/MEMS fabrication
- Plasma, glass and web coating systems
- Excellent option for manifold/gas delivery systems
