KEYENCE Datasheets for Semiconductor Metrology Instruments

Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.  
Semiconductor Metrology Instruments: Learn more

Product Name Notes
Thin Film Monitors - Optical Triangulation Position Sensor -- LK-H008 LK-G5000 High-Speed / High-Accuracy Laser Displacement Sensor The LK-G5000 is a High-Speed 1D Laser Displacement Sensor for precision displacement measurement. With a sampling speed of 392 kHz, this sensor is...
Thin Film Monitors - Confocal Laser Sensor -- LT-9010
Thin Film Monitors - Confocal Laser Sensor -- LT-9010M
Thin Film Monitors - Confocal Laser Sensor -- LT-9030
Thin Film Monitors - Confocal Laser Sensor -- LT-9030M
LT-9000 Surface Scanning Laser Confocal Sensor The LT-9000 Surface Scanning Laser Confocal Displacement Meter excels in measuring micron-level defects or thicknesses without being affected by target color or angle. The...
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F01
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F10
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F80
Semiconductor Metrology Instruments - Spectral Interference Laser Displacement Meter -- SI-F80R
Thin Film Monitors - Spectral Interference Laser Displacement Meter -- SI-F80
SI-F Series Spectral Interference Displacement Meter The SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down...