Advanced Energy Industries, Inc. Datasheets for RF Generators

RF generators and high frequency power supplies provide the power required for plasma generation, induction heating, and radar or communications applications.
RF Generators: Learn more

Product Name Notes
Compact, lightweight, and air-cooled, HiLight™ RF generators are ideal for low-power, on-board applications, suiting 13.56 MHz plasma and 1 or 2 MHz processes. Economical Flexible, single-phase input Compact design Designed for use with 230...
Need a highly efficient, compact, easy-to-integrate power source? The PDX® series provides extremely accurate, highly repeatable process control, helping to ensure process uniformity and high throughput. It’s wide frequency...
Paramount RF power generators combine frequency tuning, pulsing, and complete digital control. Full digital control for dynamic response to plasma changes Customizable frequency from 400 kHz to 60 MHz and...
Robust and versatile, the Cesar platform provides excellent RF power delivery across a wide range of frequencies and power outputs. Customized performance without custom lead times Reliable design for maximum...
The PEII series of power supplies are the trusted standard for dual-magnetron sputtering, as an effective vacuum cleaning tool, and in multiple PECVD applications. Reliable water-cooled design Delivers tight output...
When space is limited, but performance is critical, streamlined APEX RF generators offer various mounting options and power you can rely on. Chamber-, rack-, or frame-mount options for convenience and...
Wide-output frequency range Compact design Flexible communication protocol The versatile, variable-frequency LFGS generator (1250 W, 40 to 500 kHz) suits a wide variety of semiconductor and general plasma-processing applications, includ ing sputtering, reactive ion etching, plasma deposition,...