When space is limited, but performance is critical, streamlined APEX RF generators offer various mounting options and power you can rely on.
Chamber-, rack-, or frame-mount options for convenience and reduced power losses
Superb performance enhanced with arc management
1.5 to 10 kW output power options at 13.56 MHz frequency
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
Benefits
Readily integrate process tools with enhanced flexibility
Stabilize plasma operation
Improve yield for fast arc management
Easily customize and configure to your process requirements
Features
High-power density in a streamlined design
On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
Wideband control loops
Optional pulse control
High-speed arc management
When space is limited, but performance is critical, streamlined APEX RF generators offer various mounting options and power you can rely on.
- Chamber-, rack-, or frame-mount options for convenience and reduced power losses
- Superb performance enhanced with arc management
- 1.5 to 10 kW output power options at 13.56 MHz frequency
The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
Benefits
- Readily integrate process tools with enhanced flexibility
- Stabilize plasma operation
- Improve yield for fast arc management
- Easily customize and configure to your process requirements
Features
- High-power density in a streamlined design
- On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
- Wideband control loops
- Optional pulse control
- High-speed arc management
