Advanced Energy Industries, Inc. Datasheets for Wafer and Thin Film Instrumentation

Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.
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Product Name Notes
Advanced Dual-Magnetron Sputtering -- Ascent?DMS A field-proven solution for any dual-magnetron sputtering application with additional capabilities facilitating advanced process innovation. Achieve higher deposition rates with a more stable process through advanced ARC management Tune your...
Litmas® Integrated Plasma Source and Power-Delivery System -- RPS 1501
Litmas® Integrated Plasma Source and Power-Delivery System -- RPS 3001
Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact chassis. Small-footprint point-of-use abatement solution Highly reliable, effective abatement with...