Advanced Energy Industries, Inc. RF Power Supply Paramount

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RF Power Supply Paramount
Paramount RF power generators combine frequency tuning, pulsing, and complete digital control. Full digital control for dynamic response to plasma changes Customizable frequency from 400 kHz to 60 MHz and power from 100 W to 8 kW Advanced features for control optimization and synchronization Advance your process development with a new focus on operating flexibility. Paramount® RF generators offer wide frequency and power ranges, support multiple integration scenarios, and are equipped with standard serial or analog interfaces. The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation. Benefits Enhance plasma stability and process repeatability Precisely control RF power Quickly respond to plasma changes Easily adapt to meet specific application needs Features Full digital control Frequency tuning, pulsing, and pulse synchronization Real-time power and impedance measurement Arc management Phase synchronization (CEX)

Paramount RF power generators combine frequency tuning, pulsing, and complete digital control.

  • Full digital control for dynamic response to plasma changes
  • Customizable frequency from 400 kHz to 60 MHz and power from 100 W to 8 kW
  • Advanced features for control optimization and synchronization

Advance your process development with a new focus on operating flexibility. Paramount® RF generators offer wide frequency and power ranges, support multiple integration scenarios, and are equipped with standard serial or analog interfaces.

The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation.

Benefits

  • Enhance plasma stability and process repeatability
  • Precisely control RF power
  • Quickly respond to plasma changes
  • Easily adapt to meet specific application needs

Features

  • Full digital control
  • Frequency tuning, pulsing, and pulse synchronization
  • Real-time power and impedance measurement
  • Arc management
  • Phase synchronization (CEX)
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Technical Specifications

  Advanced Energy Industries, Inc.
Product Category Power Supplies
Product Number Paramount
Product Name RF Power Supply
DC Output Power 1500 to 8000 watts
Input Frequency 50 to 60 Hz
Form Factor Rack Mount
Type AC Power Source; RF Generator; Plasma Power Supply
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