Hamamatsu Photonics Datasheets for MEMS Devices

MEMS devices integrate mechanical components, electronics, sensors and actuators on a semiconductor material, chip, or wafer.
MEMS Devices: Learn more

Product Name Notes
Miniature, high performance, linear mode Electromagnetically driven two-dimensional laser scanning MEMS mirror The S13124-01 is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mecha nical systems) technology. The device...
Miniature, high performance Electromagnetically driven two-dimensional laser scanning MEMS mirror The S13989-01H is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mecha nical systems) technology. The device was made...
Ultra-miniature, high performance Electromagnetically driven laser scanning MEMS mirror The S12237-03P is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mecha nical sys-tems) technology. We achieved an ultra-miniature scale...