Miniature, high performance, linear mode Electromagnetically driven two-dimensional laser scanning MEMS mirror
The S13124-01 is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mecha
nical systems) technology. The device was made smaller by arranging the magnet beneath the mirror. A two-dimensional scanning was achieved in linear mode. Electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection angle and high mirror reflectivity.
Miniature, high performance, linear mode
Electromagnetically driven two-dimensional laser scanning MEMS mirror
The S13124-01 is an electromagnetically driven mirror that incorporates our unique MEMS (micro-electro-mechanical systems) technology. The device was made smaller by arranging the magnet beneath the mirror. A two-dimensional scanning was achieved in linear mode. Electrical current flowing in the coil surrounding the mirror produces a Lorentz force based on Fleming’s rule that drives the mirror. Hamamatsu MEMS mirrors offer a wide optical deflection angle and high mirror reflectivity.
