TSI Incorporated Particle Size Standards

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Particle Size Standards -  - TSI Incorporated
Shoreview, MN, United States
Particle Size Standards
Whether testing for particle size, count, or composition, it is imperative to use reliable particle suspensions to calibrate your surface scanning equipment or particle counters. A particle standard consists of a specific size range and number concentration of solid particles suspended in ultra-pure water (UPW). This suspension is dispersed into clean air or nitrogen and deposited onto wafers and reticles in specific patterns and sizes. Particle Standards are used to produce high-quality calibration standards for calibrating, qualifying, and monitoring the performance of wafer and photomask inspection systems.
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Technical Specifications

  TSI Incorporated
Product Category MEMS Processing Equipment
Product Name Particle Size Standards
Applications MEMS; Semiconductors
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