HORIBA Instruments, Inc. Datasheets for Process Monitors
Process monitors measure and analyze temperature, pressure, flow and other processing parameters to maintain product quality and safe production operating conditions.
Process Monitors: Learn more
| Product Name | Notes |
|---|---|
| Our Real Time Interferometric Process Monitor provides high precision detection of film thickness and trench depth during the etching/coating process. Interference occurs when monochromatic light hits the sample surface, resulting... | |
| The CS-152 standard clean monitor is a high-precision chemical concentration monitor designed for use with the SC-2 solutions used in semiconductor-manufa cturing cleaning processes. Featuring fast response and a compact... |