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Advanced Energy Industries, Inc. Litmas® Integrated Plasma Source and Power-Delivery System RPS 1501

Description
Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact chassis. Small-footprint point-of-use abatement solution Highly reliable, effective abatement with minimum utilities usage Lower cost of ownership than competitive solutions The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low-cost-of-ownershi p solutions make it a wise choice for new installations or retrofitting existing systems for abatement. Benefits Generates high reactive specie fluxes, delivering higher destruction efficiency Etch gas abatement solution that meets regulatory or green initiative goals Increases pump lifetime by reducing particulates from deposition processes Provides fast matching, stable power delivery for precise process control Comprises one small-footprint package, easy to install in existing or new production locations Features Eliminates greenhouse gas emissions Provides the highest available plasma power density Uses durable SiO2 or Al2O3 chamber materials Uses patented LitmasMatch™ solid-state power-delivery topology Integrates the power supply, match, and plasma chamber in one package
Datasheet

Suppliers

Company
Product
Description
Supplier Links
Litmas® Integrated Plasma Source and Power-Delivery System - RPS 1501 - Advanced Energy Industries, Inc.
Fort Collins, CO, USA
Litmas® Integrated Plasma Source and Power-Delivery System
RPS 1501
Litmas® Integrated Plasma Source and Power-Delivery System RPS 1501
Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact chassis. Small-footprint point-of-use abatement solution Highly reliable, effective abatement with minimum utilities usage Lower cost of ownership than competitive solutions The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low-cost-of-ownershi p solutions make it a wise choice for new installations or retrofitting existing systems for abatement. Benefits Generates high reactive specie fluxes, delivering higher destruction efficiency Etch gas abatement solution that meets regulatory or green initiative goals Increases pump lifetime by reducing particulates from deposition processes Provides fast matching, stable power delivery for precise process control Comprises one small-footprint package, easy to install in existing or new production locations Features Eliminates greenhouse gas emissions Provides the highest available plasma power density Uses durable SiO2 or Al2O3 chamber materials Uses patented LitmasMatch™ solid-state power-delivery topology Integrates the power supply, match, and plasma chamber in one package

Litmas is an all-in-one remote plasma source combining the power supply, LitmasMatch™ matching network, and plasma chamber into one compact chassis.

  • Small-footprint point-of-use abatement solution
  • Highly reliable, effective abatement with minimum utilities usage
  • Lower cost of ownership than competitive solutions

The Litmas® Remote Plasma Source (RPS) system delivers high concentrations of reactive gas species to enable advanced fluorinated gas abatement. Its small-footprint, high-performance, ease-of-use, and low-cost-of-ownership solutions make it a wise choice for new installations or retrofitting existing systems for abatement.

Benefits

  • Generates high reactive specie fluxes, delivering higher destruction efficiency
  • Etch gas abatement solution that meets regulatory or green initiative goals
  • Increases pump lifetime by reducing particulates from deposition processes
  • Provides fast matching, stable power delivery for precise process control
  • Comprises one small-footprint package, easy to install in existing or new production locations

Features

  • Eliminates greenhouse gas emissions
  • Provides the highest available plasma power density
  • Uses durable SiO2 or Al2O3 chamber materials
  • Uses patented LitmasMatch™ solid-state power-delivery topology
  • Integrates the power supply, match, and plasma chamber in one package
Supplier's Site Datasheet

Technical Specifications

  Advanced Energy Industries, Inc.
Product Category Wafer and Thin Film Instrumentation
Product Number RPS 1501
Product Name Litmas® Integrated Plasma Source and Power-Delivery System
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