The GR-300 Series can control gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system.
The stability and accuracy of the GR-300 makes it ideal for controlling the flow of Helium and Argon in wafer cooling systems.
Application example
In the below example, the GR-300 Series is controlling the gases used to cool the back side of wafers that are fixed in position by an electrostatic chuck system.
| HORIBA Instruments, Inc. | |
|---|---|
| Product Category | Pressure Controllers |
| Product Number | GR-300 Series |
| Product Name | Wafer Back Side Cooling Pressure Controller |
| Form Factor | Stand-Alone |
