Pfeiffer Vacuum, Inc. Datasheets for Vacuum Pumps and Vacuum Generators
Vacuum pumps and vacuum generators provide sub-atmospheric pressure for a variety of industrial and scientific applications where a vacuum is required.
Vacuum Pumps and Vacuum Generators: Learn more
| Product Name | Notes |
|---|---|
| Compact: Smallest turbomolecular vacuum pump on the market Reliable: Most robust turbomolecular vacuum pump on the market thanks to mechanical bearings Flexible: Automatic accessory detection, specially designed for mobile use,... | |
| Cost-efficient: Low power consumption, innovative and patented purge injection system to reduce N₂ and H₂O requirements Wide thermal range: Widest thermal range on the market, from 50°C up to 270°C... | |
| Efficient: Energy-efficient interior permanent magnet (IPM) motor with standby function, reduced power consumption, low operating costs Leakage-free: Hermetically sealed pump housing without shaft seals, no oil pan necessary, long maintenance... | |
| Flexible: Adjustable settings to match individual process requirements Robust: Advanced temperature management, corrosion-resistant material, protection against premature wear and condensation Efficient: Dry and energy-efficient | |
| Flexible: Shortest pump-down time for load lock chambers Efficient: Extremely low energy consumption, minimal maintenance, high uptime Compact: Exceptionally small and light-weight | |
| High performance: Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology,... | |
| High performance: Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid... | |
| High performance: Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition Efficient: Low cost of ownership, minimal... | |
| High performance: Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for solar, flat panel and semiconductor applications and harsh processes with high gas temperatures, such as etch... | |
| High performance: Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition Efficient: Low cost of ownership, minimal maintenance, long service... | |
| High performance: Best pumping-speed-to-siz e-ratio in its class, fast pump-down from atmospheric pressure Efficient: Lowest power consumption in its performance class, nearly maintenance-free Reliable: Integrated gas-ballast valve and optimized vacuum... | |
| High performance: Dry and energy-efficient, specially designed for semiconductor and coating applications Flexible: Adjustable settings to match individual process requirements Certified: SEMI S2 and UL 61010 certified | |
| High performance: Excellent performance when evacuating against atmosphere, constantly high pumping speeds, short cycle times Quiet: Low noise and vibration levels, ideal for use in noise-sensitive working environments Low operating... | |
| High performance: Excellent pumping speed Reliable: Integrated gas-ballast valve and vacuum safety valve Flexible: Compact design, versions for handling of corrosive gases available | |
| High performance: Extremely high vapor tolerance of 14,000 g/h, designed for high gas-ballast flows Robust: Oil regeneration unit, easy condensate drainage Reliable: No influence on bearing lifetime thanks to separated... | |
| High performance: Fastest pump-down time in its class, highly energy-efficient and powerful interior permanent magnet (IPM) synchronous motor generating less heat compared to conventional drives Quiet: Sound pressure level less... | |
| High performance: High gas throughput, reduced power consumption, integrated sensor system for maximum safety Reliable: High temperature resistance, extremely robust thanks to hybrid bearing Efficient: Cost-efficient thanks to continuous filtration... | |
| High performance: High pumping speed, best performance-to-size ratio Efficient: Hermetically sealed synchronous motor (IE5), variable speed drive, optimized rotor geometries, extended maintenance intervals, canned motor design, no shaft seals Reliable:... | |
| High performance: High pumping speed, best performance-to-size- ratio Efficient: Hermetically sealed synchronous motor (IE4), variable speed drive, optimized rotor geometries, extended maintenance intervals, canned motor design, no shaft seals Reliable:... | |
| High performance: High pumping speed, best performance-to-size- ratio Efficient: Hermetically sealed synchronous motor (IE5), variable speed drive, optimized rotor geometries, extended maintenance intervals, canned motor design, no shaft seals Reliable:... | |
| High performance: Maximum compression and high gas throughput due to an extended thermal operating range. Flexible: Suitable for use in all portable analytical applications thanks to its compact design and... | |
| High temperature and flow: Wide process range, high corrosion resistance Self-diagnostics: Built-in sensor for performance diagnostics, maintenance optimizations and external communications Economical: Optimized temperature management, low power and cooling water... | |
| Intelligent: State-of-the-art communication protocols adapted to process requirements Compact: Easy integration on tools or in sub-floor areas thanks to adjustable inlet position High performance: Low ultimate pressure, high throughput | |
| Process safety: Oil- and particle-free vacuum ensures contamination-free, stable process conditions. Easy system integration: Compact footprint and smart DC features simplify integration into instruments and vacuum systems. Quiet operation: Low... | |
| Process safety: Oil- and particle-free vacuum ensures contamination-free, stable process conditions. Quiet operation: Low noise and low vibration support comfortable lab work and stable analytical conditions. Lowest operating cost: Energy-efficient... | |
| Process safety: Oil- and particle-free vacuum for contamination-free operation up to cleanroom class ISO 8. Reliable low-maintenance operation: Durable diaphragm pump design minimizes service effort and reduces maintenance interventions. Quiet... | |
| Quiet: Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation Flexible: Compatible with a variety of backing pumps, excellent compression ratio for... | |
| Quiet: Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation Flexible: Compatible with a variety of backing pumps, MT version with integrated... | |
| Reliable: Best-in-class hybrid bearing technology, long life cycle, maximum uptime Easy maintenance: On-site bearing change, insensitive to process dust High performance: Specially designed for coating processes, optimized rotor/stator concept | |
| Reliable: Best-in-class hybrid bearing technology, long life cycle, maximum uptime Innovative: Specially designed for ion implantation systems, optimized for pumping light gases Robust: Integrated heating system, suitable for harsh processes,... | |
| Reliable: Best-in-class hybrid bearing technology, long life cycle, maximum uptime Low magnetic stray field: Ideal for high-sensitivity applications such as high-resolution electron microscopes Quiet: Low noise and vibration levels thanks... | |
| Reliable: Best-in-class hybrid bearing technology, long life cycle, maximum uptime Quiet: Low noise and vibration levels thanks to patented laser balancing technology High performance: Best compression ratio for light gases,... | |
| Reliable: Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle High gas throughput: High pumping speed, compatible with a variety of backing pumps, high compression for light gases... | |
| Reliable: Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle High performance: Optimized rotor geometry, enhanced gas load handling High gas throughput: High pumping speed, compatible with a... | |
| Reliable: Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle High performance: Optimized rotor geometry, enhanced gas load handling Quiet: Low noise and vibration levels thanks to patented... | |
| Reliable: Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle Quiet: Low noise and vibration levels thanks to patented laser balancing technology, perfectly suited for vibration-sensitive applications High... | |
| Reliable: Extended thermal operating range, long maintenance intervals High performance: Maximum compression in a compact design Flexible: Easy integration even into small analytical systems, installation in any orientation | |
| Reliable: High uptime, increased safety thanks to process monitoring via integrated sensors, intelligent user interface of vacuum booster High performance: High pumping speed at low ultimate pressures, fast pump-down times,... | |
| Reliable: High uptime, increased safety thanks to process monitoring via integrated sensors, intelligent user interface of vacuum booster High performance: High pumping speed, fast pump-down times, high energy efficiency Flexible:... | |
| Reliable: Hydrocarbon-free, automatic sensor calibration during operation Quiet: Low noise and vibration levels Maintenance-free: Electromagnetic suspension protecting rotor from premature wear, continuous rotor imbalance compensation | |
| Reliable: Nearly maintenance-free, high-quality bearings, long life cycle Efficient: Low power consumption, IE5 permanent magnet motor High performance: High pumping speed at high pressures, ideal for large volumes and frequent... | |
| Reliable: No wearing parts inside the compression chamber, long life cycle Dry: Hydrocarbon-free, oil- and contact-free operation High performance: Constant pumping speed, low ultimate pressure | |
| Reliable: Vacuum pump units with robust and proven DuoVane backing pumps enhanced by PANDA vacuum boosters, reliable operation, minimal maintenance High performance: High pumping speed at low ultimate pressures, fast... | |
| Robust: Best-in-class hybrid bearing technology, maximum uptime, nickel-coated surfaces for corrosive applications Flexible: Extensive portfolio, standard accessories and communication tools High performance: High pumping speed, excellent compression for light gases... | |
| Robust: Integrated rotor temperature measurement system, reliable performance throughout complete thermal operating range Quiet: Low noise and vibration levels thanks to patented laser balancing technology, perfectly suited for vibration-sensitive applications... | |
| Robust: Perfectly suited for harsh semiconductor processes, nickel coating for increased corrosion resistance, design options for dealing with by-product generation Reliable: Extended lifetime Efficient: High-efficiency motors, limited use of electric... | |
| Robust: Specially designed for very harsh processes, high particle tolerance, excellent corrosion resistance Reliable: Extended lifetime High performance: Best- in-class compression ratio, lowest power consumption on the market | |
| User-friendly: 7" color touch display for intuitive operation, plug&pump design, easy access to all system settings Intelligent: Remote control via web server for optimum performance and recording of measurement data... | |
| User-friendly: Easy installation Reliable: Integrated gas-ballast valve and vacuum safety valve, perfectly suited for industrial applications Flexible: Compact design, versions for handling of corrosive gases available | |
| User-friendly: Easy installation Reliable: Integrated gas-ballast valve and vacuum safety valve, perfectly suited for industrial applications Flexible: Compact design, wide range of accessories |