Pfeiffer Vacuum, Inc. Turbomolecular vacuum pumps ATH 1603 M

Description
Quiet: Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation Flexible: Compatible with a variety of backing pumps, MT version with integrated heating system for demanding chemical conditions, frequency-controlled direct current (DC) motors Maintenance-free: No wearing parts thanks to magnetic bearing technology, reduced particle contamination or build-up of residue in MT version
  • Turbomolecular vacuum pumps - ATH 1603 M - Pfeiffer Vacuum, Inc.
    Pfeiffer Vacuum, Inc.
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Description
Quiet: Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation Flexible: Compatible with a variety of backing pumps, MT version with integrated heating system for demanding chemical conditions, frequency-controlled direct current (DC) motors Maintenance-free: No wearing parts thanks to magnetic bearing technology, reduced particle contamination or build-up of residue in MT version
Request a Quote Datasheet

Suppliers

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Product
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Turbomolecular vacuum pumps - ATH 1603 M - Pfeiffer Vacuum, Inc.
Pfeiffer Vacuum, Inc.
Nashua, NH, United States
Turbomolecular vacuum pumps
ATH 1603 M
Turbomolecular vacuum pumps ATH 1603 M
Quiet: Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation Flexible: Compatible with a variety of backing pumps, MT version with integrated heating system for demanding chemical conditions, frequency-controlled direct current (DC) motors Maintenance-free: No wearing parts thanks to magnetic bearing technology, reduced particle contamination or build-up of residue in MT version

Quiet: Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation Flexible: Compatible with a variety of backing pumps, MT version with integrated heating system for demanding chemical conditions, frequency-controlled direct current (DC) motors Maintenance-free: No wearing parts thanks to magnetic bearing technology, reduced particle contamination or build-up of residue in MT version

Supplier's Site Datasheet

Technical Specifications

  Pfeiffer Vacuum, Inc.
Product Category High Vacuum Pumps
Product Number ATH 1603 M
Product Name Turbomolecular vacuum pumps
Configuration Individual Vacuum Pump
Application Industrial; Medical / Laboratory; Semiconductor
Features Magnetic Bearing
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