COBRA DS 3161 C is a dry screw vacuum pump designed for high-vacuum applications such as chemical vapor deposition, rapid thermal processing, and atomic layer deposition. It features an integrated vacuum booster and directly mounted canned motor on a compact base frame. The pump delivers a nominal pumping speed of 3200 m³/h at 20°C and achieves an ultimate pressure of 0.001 hPa. It is powered by a 15 kW backing pump motor and a 15 kW vacuum booster motor, operating at 3600 min⁻¹ and 5400 min⁻¹ respectively. Power consumption at ultimate pressure is 11.8 kW. The unit weighs approximately 1375 kg and has dimensions of 1316 x 633 x 1249 mm, with gas inlet and outlet sizes of DN 160 and DN 63. Minimum water consumption is 10 l/min, and nitrogen consumption ranges from 0 to 200 l/min. Sound pressure level is less than 75 dB(A).
High performance: Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition Efficient: Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput Compact: Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame
| Pfeiffer Vacuum, Inc. | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | COBRA DS 3161 C |
| Product Name | Dry screw vacuum pumps |
| Vacuum Pump Type | Mechanical |
