Pfeiffer Vacuum, Inc. Datasheets for Mechanical Vacuum Pumps and Systems
Mechanical vacuum pumps and systems contain devices such as pistons, claws, scrolling spirals, and diaphragms to isolate and compress air.
Mechanical Vacuum Pumps and Systems: Learn more
| Product Name | Notes |
|---|---|
| Cost-efficient: Low power consumption, innovative and patented purge injection system to reduce N₂ and H₂O requirements Wide thermal range: Widest thermal range on the market, from 50°C up to 270°C... | |
| Efficient: Energy-efficient interior permanent magnet (IPM) motor with standby function, reduced power consumption, low operating costs Leakage-free: Hermetically sealed pump housing without shaft seals, no oil pan necessary, long maintenance... | |
| Flexible: Adjustable settings to match individual process requirements Robust: Advanced temperature management, corrosion-resistant material, protection against premature wear and condensation Efficient: Dry and energy-efficient | |
| Flexible: Shortest pump-down time for load lock chambers Efficient: Extremely low energy consumption, minimal maintenance, high uptime Compact: Exceptionally small and light-weight | |
| High performance: Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology,... | |
| High performance: Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid... | |
| High performance: Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition Efficient: Low cost of ownership, minimal... | |
| High performance: Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for solar, flat panel and semiconductor applications and harsh processes with high gas temperatures, such as etch... | |
| High performance: Advanced screw design, excellent running qualities, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition Efficient: Low cost of ownership, minimal maintenance, long service... | |
| High performance: Best pumping-speed-to-siz e-ratio in its class, fast pump-down from atmospheric pressure Efficient: Lowest power consumption in its performance class, nearly maintenance-free Reliable: Integrated gas-ballast valve and optimized vacuum... | |
| High performance: Dry and energy-efficient, specially designed for semiconductor and coating applications Flexible: Adjustable settings to match individual process requirements Certified: SEMI S2 and UL 61010 certified | |
| High performance: Excellent performance when evacuating against atmosphere, constantly high pumping speeds, short cycle times Quiet: Low noise and vibration levels, ideal for use in noise-sensitive working environments Low operating... | |
| High performance: Excellent pumping speed Reliable: Integrated gas-ballast valve and vacuum safety valve Flexible: Compact design, versions for handling of corrosive gases available | |
| High performance: Extremely high vapor tolerance of 14,000 g/h, designed for high gas-ballast flows Robust: Oil regeneration unit, easy condensate drainage Reliable: No influence on bearing lifetime thanks to separated... | |
| High performance: Fastest pump-down time in its class, highly energy-efficient and powerful interior permanent magnet (IPM) synchronous motor generating less heat compared to conventional drives Quiet: Sound pressure level less... | |
| High performance: High pumping speed, best performance-to-size ratio Efficient: Hermetically sealed synchronous motor (IE5), variable speed drive, optimized rotor geometries, extended maintenance intervals, canned motor design, no shaft seals Reliable:... | |
| High performance: High pumping speed, best performance-to-size- ratio Efficient: Hermetically sealed synchronous motor (IE4), variable speed drive, optimized rotor geometries, extended maintenance intervals, canned motor design, no shaft seals Reliable:... | |
| High performance: High pumping speed, best performance-to-size- ratio Efficient: Hermetically sealed synchronous motor (IE5), variable speed drive, optimized rotor geometries, extended maintenance intervals, canned motor design, no shaft seals Reliable:... | |
| Intelligent: State-of-the-art communication protocols adapted to process requirements Compact: Easy integration on tools or in sub-floor areas thanks to adjustable inlet position High performance: Low ultimate pressure, high throughput | |
| Process safety: Oil- and particle-free vacuum ensures contamination-free, stable process conditions. Easy system integration: Compact footprint and smart DC features simplify integration into instruments and vacuum systems. Quiet operation: Low... | |
| Process safety: Oil- and particle-free vacuum ensures contamination-free, stable process conditions. Quiet operation: Low noise and low vibration support comfortable lab work and stable analytical conditions. Lowest operating cost: Energy-efficient... | |
| Process safety: Oil- and particle-free vacuum for contamination-free operation up to cleanroom class ISO 8. Reliable low-maintenance operation: Durable diaphragm pump design minimizes service effort and reduces maintenance interventions. Quiet... | |
| Reliable: High uptime, increased safety thanks to process monitoring via integrated sensors, intelligent user interface of vacuum booster High performance: High pumping speed at low ultimate pressures, fast pump-down times,... | |
| Reliable: High uptime, increased safety thanks to process monitoring via integrated sensors, intelligent user interface of vacuum booster High performance: High pumping speed, fast pump-down times, high energy efficiency Flexible:... | |
| Reliable: Nearly maintenance-free, high-quality bearings, long life cycle Efficient: Low power consumption, IE5 permanent magnet motor High performance: High pumping speed at high pressures, ideal for large volumes and frequent... | |
| Reliable: No wearing parts inside the compression chamber, long life cycle Dry: Hydrocarbon-free, oil- and contact-free operation High performance: Constant pumping speed, low ultimate pressure | |
| Reliable: Vacuum pump units with robust and proven DuoVane backing pumps enhanced by PANDA vacuum boosters, reliable operation, minimal maintenance High performance: High pumping speed at low ultimate pressures, fast... | |
| Robust: Perfectly suited for harsh semiconductor processes, nickel coating for increased corrosion resistance, design options for dealing with by-product generation Reliable: Extended lifetime Efficient: High-efficiency motors, limited use of electric... | |
| Robust: Specially designed for very harsh processes, high particle tolerance, excellent corrosion resistance Reliable: Extended lifetime High performance: Best- in-class compression ratio, lowest power consumption on the market | |
| User-friendly: Easy installation Reliable: Integrated gas-ballast valve and vacuum safety valve, perfectly suited for industrial applications Flexible: Compact design, versions for handling of corrosive gases available | |
| User-friendly: Easy installation Reliable: Integrated gas-ballast valve and vacuum safety valve, perfectly suited for industrial applications Flexible: Compact design, wide range of accessories |