Pfeiffer Vacuum, Inc. Datasheets for High Vacuum Pumps
High and ultrahigh vacuum pumps operate efficiently in the high vacuum region and develop molecular flow for highly evacuated systems.
High Vacuum Pumps: Learn more
| Product Name | Notes |
|---|---|
| Compact: Smallest turbomolecular vacuum pump on the market Reliable: Most robust turbomolecular vacuum pump on the market thanks to mechanical bearings Flexible: Automatic accessory detection, specially designed for mobile use,... | |
| High performance: Best pumping-speed-to-siz e-ratio in its class, fast pump-down from atmospheric pressure Efficient: Lowest power consumption in its performance class, nearly maintenance-free Reliable: Integrated gas-ballast valve and optimized vacuum... | |
| High performance: Excellent performance when evacuating against atmosphere, constantly high pumping speeds, short cycle times Quiet: Low noise and vibration levels, ideal for use in noise-sensitive working environments Low operating... | |
| High performance: Excellent pumping speed Reliable: Integrated gas-ballast valve and vacuum safety valve Flexible: Compact design, versions for handling of corrosive gases available | |
| High performance: Fastest pump-down time in its class, highly energy-efficient and powerful interior permanent magnet (IPM) synchronous motor generating less heat compared to conventional drives Quiet: Sound pressure level less... | |
| High performance: High gas throughput, reduced power consumption, integrated sensor system for maximum safety Reliable: High temperature resistance, extremely robust thanks to hybrid bearing Efficient: Cost-efficient thanks to continuous filtration... | |
| High performance: Maximum compression and high gas throughput due to an extended thermal operating range. Flexible: Suitable for use in all portable analytical applications thanks to its compact design and... | |
| High temperature and flow: Wide process range, high corrosion resistance Self-diagnostics: Built-in sensor for performance diagnostics, maintenance optimizations and external communications Economical: Optimized temperature management, low power and cooling water... | |
| Quiet: Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation Flexible: Compatible with a variety of backing pumps, excellent compression ratio for... | |
| Quiet: Low noise and vibration levels, perfectly suited for vibration-sensitive applications in semiconductor manufacturing processes and analytical instrumentation Flexible: Compatible with a variety of backing pumps, MT version with integrated... | |
| Reliable: Best-in-class hybrid bearing technology, long life cycle, maximum uptime Easy maintenance: On-site bearing change, insensitive to process dust High performance: Specially designed for coating processes, optimized rotor/stator concept | |
| Reliable: Best-in-class hybrid bearing technology, long life cycle, maximum uptime Innovative: Specially designed for ion implantation systems, optimized for pumping light gases Robust: Integrated heating system, suitable for harsh processes,... | |
| Reliable: Best-in-class hybrid bearing technology, long life cycle, maximum uptime Low magnetic stray field: Ideal for high-sensitivity applications such as high-resolution electron microscopes Quiet: Low noise and vibration levels thanks... | |
| Reliable: Best-in-class hybrid bearing technology, long life cycle, maximum uptime Quiet: Low noise and vibration levels thanks to patented laser balancing technology High performance: Best compression ratio for light gases,... | |
| Reliable: Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle High gas throughput: High pumping speed, compatible with a variety of backing pumps, high compression for light gases... | |
| Reliable: Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle High performance: Optimized rotor geometry, enhanced gas load handling High gas throughput: High pumping speed, compatible with a... | |
| Reliable: Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle High performance: Optimized rotor geometry, enhanced gas load handling Quiet: Low noise and vibration levels thanks to patented... | |
| Reliable: Best-in-class hybrid bearing technology, superior bearing lubrication for long life cycle Quiet: Low noise and vibration levels thanks to patented laser balancing technology, perfectly suited for vibration-sensitive applications High... | |
| Reliable: Extended thermal operating range, long maintenance intervals High performance: Maximum compression in a compact design Flexible: Easy integration even into small analytical systems, installation in any orientation | |
| Reliable: Hydrocarbon-free, automatic sensor calibration during operation Quiet: Low noise and vibration levels Maintenance-free: Electromagnetic suspension protecting rotor from premature wear, continuous rotor imbalance compensation | |
| Reliable: Nearly maintenance-free, high-quality bearings, long life cycle Efficient: Low power consumption, IE5 permanent magnet motor High performance: High pumping speed at high pressures, ideal for large volumes and frequent... | |
| Reliable: No wearing parts inside the compression chamber, long life cycle Dry: Hydrocarbon-free, oil- and contact-free operation High performance: Constant pumping speed, low ultimate pressure | |
| Robust: Best-in-class hybrid bearing technology, maximum uptime, nickel-coated surfaces for corrosive applications Flexible: Extensive portfolio, standard accessories and communication tools High performance: High pumping speed, excellent compression for light gases... | |
| Robust: Integrated rotor temperature measurement system, reliable performance throughout complete thermal operating range Quiet: Low noise and vibration levels thanks to patented laser balancing technology, perfectly suited for vibration-sensitive applications... | |
| User-friendly: 7" color touch display for intuitive operation, plug&pump design, easy access to all system settings Intelligent: Remote control via web server for optimum performance and recording of measurement data... |