EBARA Technologies, Inc. Datasheets for Vacuum Pumps and Vacuum Generators

Vacuum pumps and vacuum generators provide sub-atmospheric pressure for a variety of industrial and scientific applications where a vacuum is required.
Vacuum Pumps and Vacuum Generators: Learn more

Product Name Notes
The EMT Series offers five major types of turbomolecular pumps - temperature-controll ed, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features...
The EST Series consists of a two-stage screw design main pump engineered for application in harsh duty processes. The main pump is packaged with a lobe style booster pump for...
The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features...
The VOS Series has the highest pumping speed to footprint ratio in the industry. The VOS is a multistage lobe pump designed for installation on or very close to the...