The VOS Series has the highest pumping speed to footprint ratio in the industry. The VOS is a multistage lobe pump designed for installation on or very close to the process tool for clean and light duty applications such as Load Lock and SEM.
| EBARA Technologies, Inc. | |
|---|---|
| Product Category | Vacuum Pumps and Vacuum Generators |
| Product Number | VOS100 |
| Product Name | VOS Series Dry Vacuum Pump |
| Vacuum Pump Type | Mechanical |
| Configuration | Individual Vacuum Pump |
| Application | Industrial; Semiconductor |
| Features | Vacuum Gauge |
