EBARA Technologies, Inc. Datasheets for Scrubbers
Air scrubbers, wet scrubbers, and gas scrubbers are air pollution control devices that use a high-energy liquid spray to remove aerosol and gaseous pollutants from an air stream. The gases are removed either by absorption or chemical reaction.
Scrubbers: Learn more
| Product Name | Notes |
|---|---|
| Ebara's GCR abatement systems cleanly and efficiently remove carbon monoxide and PFC gases from ashing and oxide etch semiconductor waste streams. The standard GCR model targets CO gases using a... | |
| EBARA's GDC250 point-of-use gas abatement system combines the features and benefits of a patented rolling burner and a high efficiency fan scrubber. The GDC250 is specifically designed for high decomposition... | |
| Gas Inlet Devices Patent gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions Second Scrubbing Chamber Five fine spray, high velocity nozzles... |