EBARA Technologies, Inc. Datasheets for High Vacuum Pumps

High and ultrahigh vacuum pumps operate efficiently in the high vacuum region and develop molecular flow for highly evacuated systems.
High Vacuum Pumps: Learn more

Product Name Notes
EMT Series Turbomolecular Pump -- EMT1300
EMT Series Turbomolecular Pump -- EMT2400
EMT Series Turbomolecular Pump -- EMT3260
EMT Series Turbomolecular Pump -- EMT390
EMT Series Turbomolecular Pump -- EMT420
EMT Series Turbomolecular Pump -- EMT900
The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a...
ET-WS Series Turbo Pump -- ET-1301WS
ET-WS Series Turbo Pump -- ET-1600WS
ET-WS Series Turbo Pump -- ET-2500WS
ET-WS Series Turbo Pump -- ET-300WS
ET-WS Series Turbo Pump -- ET-3300WS
ET-WS Series Turbo Pump -- ET-450WS
ET-WS Series Turbo Pump -- ET-600WS
The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features...