EBARA Technologies, Inc. Datasheets for High Vacuum Pumps
High and ultrahigh vacuum pumps operate efficiently in the high vacuum region and develop molecular flow for highly evacuated systems.
High Vacuum Pumps: Learn more
| Product Name | Notes |
|---|---|
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EMT Series Turbomolecular Pump -- EMT1300
EMT Series Turbomolecular Pump -- EMT2400 EMT Series Turbomolecular Pump -- EMT3260 EMT Series Turbomolecular Pump -- EMT390 EMT Series Turbomolecular Pump -- EMT420 EMT Series Turbomolecular Pump -- EMT900 |
The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features a... |
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ET-WS Series Turbo Pump -- ET-1301WS
ET-WS Series Turbo Pump -- ET-1600WS ET-WS Series Turbo Pump -- ET-2500WS ET-WS Series Turbo Pump -- ET-300WS ET-WS Series Turbo Pump -- ET-3300WS ET-WS Series Turbo Pump -- ET-450WS ET-WS Series Turbo Pump -- ET-600WS |
The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features... |