EBARA Technologies, Inc. Datasheets for High Vacuum Pumps
High and ultrahigh vacuum pumps operate efficiently in the high vacuum region and develop molecular flow for highly evacuated systems.
High Vacuum Pumps: Learn more
| Product Name | Notes |
|---|---|
| The EMT Series offers five major types of turbomolecular pumps - temperature-controll ed, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The EMT Series turbomolecular pumps features... | |
| The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series. The ET turbomolecular pumps features... |