The ET Series offers two major types of turbomolecular pumps - high compression, ET-H Series turbomolecular pumps, and a wide range corrosion resistant, ET-WS Series.
The ET turbomolecular pumps features a wide pressure range with maximum back pressure of 3 Torr.
The ET-WS Series turbomolecular pumps also offer a temperature controlled model, and the ET-WS (-A) model turbomolecular pumps has been designed for etching applications.
| EBARA Technologies, Inc. | |
|---|---|
| Product Category | High Vacuum Pumps |
| Product Number | ET-600WS |
| Product Name | ET-WS Series Turbo Pump |
| Configuration | Combination |
| Application | Industrial; Semiconductor |
| Features | Magnetic Bearing |
| Ultimate Vacuum | 1.00E-6 torr (29.92 in Hg vac) |
| Pumping Speed | 636 to 3390 CFM (1081 to 5766 m³/hr) |
