EBARA Technologies, Inc. Datasheets for Semiconductor Cluster Tools
Semiconductor cluster tools and equipment are used to process semiconductor wafers for the production of microelectronic components.
Semiconductor Cluster Tools: Learn more
| Product Name | Notes |
|---|---|
| Gas Inlet Devices Patent gas inlet devices minimize rate of restriction and automatic gas inlet plunger removes restrictions without process interruptions Second Scrubbing Chamber Five fine spray, high velocity nozzles... |