Sensirion Datasheets for Mass Flow Meters and Controllers

Mass flow meters and controllers measure flow rate in units of mass or volume per units of time (e.g., pounds per minute). They are designed for use with gases, liquids, steams, or slurries. 
Mass Flow Meters and Controllers: Learn more

Product Name Notes
Proximal Flow Sensor for Neonatal and Pediatric OEM Applications The SFM3400 flow sensor is a proximal flow sensor for neonatal and pediatric applications in respiratory devices such as ventilation or...
Besides the standard gas flow sensor solutions, Sensirion also offers customized OEM sensor solutions at an attractive price performance ratio. We adapt or develop your customized mass flow meters according...
Designed for anesthesia equipment, the CMOSens® mass flow meter SFM4100 precisely measures air and other non-aggressive gases. It provides an impressively wide dynamic measuring range up to 20 slm. The...
SFM3000 is a digital flow meter especially suitable for high-volume applications. The design of the flow channel results in very low pressure drop through the sensor element, making it highly...
The analog mass flow meter SFM3100 is highly accurate and fast. The SFM3100 has a compact design and can be easily integrated into existing devices. There is a temperature sensor...
The SFM3200 mass flow meter is best suitable for inspiratory flow measurements. In addition, an autoclavable / washable version is available (SFM3200-AW), which is able to withstand autoclave procedures, making...
The SFM3300 mass flow meter is a sensor for proximal flow measurement in respiratory applications such as ventilation or anesthesia. There are two versions available: the SFM3300-AW is autoclavable and...
The SFM4200 digital mass flow meter for air, oxygen and non-corrosive gases is particularly suitable for high-volume applications. One highlight is its pressure resistance. In contrast to its predecessors, the...
The SFM5400 mass flow meter measures mass flows with outstanding accuracy (errors < 1%), long-term stability and repeatability and covers an impressively wide dynamic measurement range. The SFM5400 is made...