Brooks Instrument Datasheets for Vaporizers
Vaporizers are heat exchangers that convert liquefied gases to a warm gaseous product. The heat source can be ambient air, steam or water.
Vaporizers: Learn more
|Flanged DLI Vaporizer -- DLIFS||Designed to enable the user to perform their own maintenance and cleaning, the direct liquid inject flange (DLIFS) vaporizer from Brooks Instrument provides indirect vaporization-on-demand for most liquid precursors. Conventional...|
|Welded DLI Vaporizer, DLIW Series -- DLIWV / DLIWS / DLIWM / DLIWL||The Welded DLI Series vaporizer from Brooks Instrument utilizes a fully welded construction of 316L stainless steel for highly durable devices with an all-stainless steel vapor flow path. There are...|
|High Capacity DLI Vaporizer, DLIHV Series -- DLIHVN / DLIHVP / DLIHVV / DLIHVY||Vaporization technologies were unable to provide a viable solution for the industry until Brooks Instrument introduced its 2nd generation DLI heat exchanger technology, called DLI High Capacity Vaporizer (DLIHV). The...|