Filmetrics, Inc. Datasheets for Semiconductor Metrology Instruments
Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.
Semiconductor Metrology Instruments: Learn more
| Product Name | Notes |
|---|---|
| Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments The Filmetrics F60-c family maps film thickness and index just like our F50 products, but it also includes a number of... | |
| Automated Film Thickness Mapping The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks... | |
| Automated Thickess Mapping for Production Environments The Filmetrics F60-t family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically... | |
| Boost the Capabilities and Extend the Life of Your NanoSpec™ 180/210 System Your NanoSpec™ has been a workhorse for your fab, but many years of use may have caused maintenance... | |
| High-Resolution Film Thickness Maps The Filmetrics F42 can map the thickness of films, such as OSP, at over one-million points, each with a spot size as small as 3 microns. | |
| Measure Films as Thin as 4nm The F40-UV can be configured to measure films as thin as 4nm on a spot size as small as 7 microns. It comes complete... | |
| Product-Wafer Metrology Made Affordable Process engineers want film thickness measurements fast and without a lot of hassle. Our innovative Thickness Imaging™ technology allows Filmetrics to offer easy recipe set up... | |
| The Most Powerful Tool Available for Monitoring Thin-Film Deposition Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the... | |
| Turn Your Microscope into a Film Thickness Measurement Tool The F40 product family is for applications that require a spot size as small as 1 micron. For most microscopes the... | |
| Measure film thickness in-line and in real-time at up to seven locations with the F37. Example Layers Almost any smooth and at-least-partially transparent films may be measured. This includes virtually... |